Patents by Inventor Jerry C. Yue

Jerry C. Yue has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method to getter contamination in semiconductor devices
    Patent number: 5244819
    Abstract: A frontside gettering method for removing metallic contamination from a thin film SOI or SOS silicon device. Damage sites are created by ion implantation into inactive regions of a silicon substrate. An annealing step causes metallic contamination to diffuse from the active device region to the inactive region. The inactive region material is removed prior to subsequent processing steps.
    Type: Grant
    Filed: October 22, 1991
    Date of Patent: September 14, 1993
    Assignee: Honeywell Inc.
    Inventor: Jerry C. Yue