Abstract: The present invention provides a reliable, high-repetition rate, production line compatible high energy photon source. A very hot plasma containing an active material is produced in vacuum chamber. The active material is an atomic element having an emission line within a desired extreme ultraviolet (EUV) range. A pulse power source comprising a charging capacitor and a magnetic compression circuit comprising a pulse transformer, provides electrical pulses having sufficient energy and electrical potential sufficient to produce the EUV light at an intermediate focus at rates in excess of 5 Watts. In preferred embodiments designed by Applicants in-band, EUV light energy at the intermediate focus is 45 Watts extendable to 105.8 Watts.

Abstract: Systems and methods for EUV Light Source metrology are disclosed. In a first aspect, a system for measuring an EUV light source power output may include a photoelectron source material disposed along an EUV light pathway to expose the material and generate a quantity of photoelectrons. The system may further include a detector for detecting the photoelectrons and producing an output indicative of EUV power. In another aspect, a system for measuring an EUV light intensity may include a multi-layer mirror, e.g., Mo/Si, disposable along an EUV light pathway to expose the mirror and generate a photocurrent in the mirror. A current monitor may be connected to the mirror to measure the photocurrent and produce an output indicative of EUV power. In yet another aspect, an off-line EUV metrology system may include an instrument for measuring a light characteristic and MoSi2/Si multi-layer mirror.

Abstract: A laser produced plasma (“LPP”) extreme ultraviolet (“EUV”) light source and method of operating same is disclosed which may comprise an EUV plasma production chamber having a chamber wall; a drive laser entrance window in the chamber wall; a drive laser entrance enclosure intermediate the entrance window and a plasma initiation site within the chamber and comprising an entrance enclosure distal end opening; at least one aperture plate intermediate the distal opening and the entrance window comprising at least one drive laser passage aperture. The at least one aperture plate may comprise at least two aperture plates comprising a first aperture plate and a second aperture plate defining an aperture plate interim space. The at least one drive laser aperture passage may comprise at least two drive laser aperture passages.

Abstract: A system is disclosed for protecting an internal EUV light source component from ions generated at a plasma formation site. In one aspect, the system may comprise a plurality of foil plates and an arrangement for generating a magnetic field to deflect ions into one of the foil plate surfaces. In another aspect, an electrostatic grid may be positioned for interaction with ions to reduce ion energy, and a magnetic field may be used to deflect the reduced energy ions onto paths wherein the ions do not strike the internal component. In yet another aspect, a grid may be connected to a circuit tuned to a resonant frequency to reduce ion energy. For example, the resonant frequency may be substantially equal to an inverse of a time difference between the time when electrons reach the grid and a subsequent time when ions reach the grid.

Abstract: The present invention provides a reliable, high-repetition rate, production line compatible high energy photon source. A very hot plasma containing an active material is produced in vacuum chamber. The active material is an atomic element having an emission line within a desired extreme ultraviolet (EUV) range. A pulse power source comprising a charging capacitor and a magnetic compression circuit comprising a pulse transformer, provides electrical pulses having sufficient energy and electrical potential sufficient to produce the EUV light at an intermediate focus at rates in excess of 5 Watts. In preferred embodiments designed by Applicants in-band, EUV light energy at the intermediate focus is 45 Watts extendable to 105.8 Watts.

Abstract: A core with coils and permanent magnet, and a movable magnet holder including permanent magnet and contained within a channel defined by a magnet holder housing is provided. By aligning the north and south poles of the two permanent magnets in relation to each other and the poles of the electromagnet formed by the electromagnetic coils and core, motion of the magnet holder both toward and away from the core between a first and second position can be readily induced by applying voltage across the leads of the electromagnetic coils. This motion can be used to move a switching means back and forth between two positions relating to the first and second positions of the magnet holder to perform various failsafe, latching and other useful switching functions.

Abstract: A switching device providing highly-reliable, frictionless, adjustment-free operation is described. Comprised of a comparatively small number of moving parts, the various aspects of the invention offer compact, cost-effective, reliable alternatives to their complex electromagnetic and costly solid-state counterparts. The main parts of the invention rely upon the principles of magnetic attraction and repulsion for the switching of a plurality of electrical contacts contained within the switching device. The flexibility inherent in the design of the invention permits the switching device to be configured in a variety of aspects, including the failsafe and latching designs described herein.

Abstract: An electromagnetic switching device for controlling the flow of electrical current between a plurality of pins. The switching device includes a base, an input pin, first and second output pins, a reed, an actuator, a magnetic field generator, and generator pins. The reed and actuators are movable between a first position which electrically couples the first output pin and the input pin, and a second position which electrically couples the second output pin and the input pin. Dielectric compatible plastic material with enhanced shielding characteristics is located in apertures in the base to structurally retain the pins therein. The actuator further includes a center body portion, an arm integrally molded with the center body portion extending generally laterally outward therefrom, and a finger depending downwardly from the arm. The finger is structurally coupled to the movable reed to move the reed between its first and second positions.

Abstract: The solenoid includes an electrical coil having a central opening in which is fixedly located a rod formed of a material of the type capable of being magnetized when in a magnetic field. A plunger is supported for movement toward and away from one end of the rod. A permanent magnet is supported by the plunger. In one embodiment the permanent magnet is located such that the plunger and permanent magnet are held next to the coil when the coil is in a deactivated condition. When the coil is activated, the magnetic field produced by the coil repels the permanent magnet and hence the plunger away from the coil. The polarity of the permanent magnet can be reversed in position such that normally the permanent magnet and hence the plunger are normally repelled away from the rod end when the coil is in a deactivated condition. When the coil is activated in a given manner, the magnetic filed of the coil pulls the magnet and hence the plunger next to the coil.

Abstract: A solenoid actuator having a slider element with a permanent magnet is provided. When the electromagnet is activated, the electromagnet repels the permanent magnet, moving the permanent magnet of the slider toward a second position under the influence of a mass of ferro-magnetic material located adjacent the second position. In a preferred embodiment, the poles of the slider permanent magnet are co-axially aligned with the coil and core of the electromagnet. In an alternative embodiment, the mass of ferromagnetic material may be eliminated.

Abstract: A high-speed, high-reliability electromagnetic relay particularly adapted for use in electronic systems with signal frequencies from DC in excess of 20 MHz. A ferro-magnetic armature is attached to an actuator plate made of dielectric material which is in contact with a flexible contact reed. One end of the contact reed is in fixed electrical contact with an input pin and the other end is movable between a normal position in electrical contact with a first output pin and a second position in electric contact with a second output pin. To improve resistance to environmental extremes such as shock and vibration, a permanent magnet can be located so that its attractive force holds the armature in the normal position.

Abstract: A matrix switch is provided having a plurality of input and output conductors adjacent each other such that an input connector may be connected to one of many output connectors upon actuation of a single movable conductor. Transfer conductors disposed adjacent to the input and output connectors allows the input connector to be electrically coupled to the remaining output connectors.

Abstract: A high-speed, high-reliability electromagnetic relay particularly adapted for use in electronic systems in a configuration suitable for signal frequencies from DC to about 8 GHz. A permanent magnet is embedded in a nonconductive material, which is adapted to loosely receive a mid-portion of a contact reed. The embedded permanent magnet serves as a slider. One end of the contact reed is pivotally connected to an input pin of the relay, such that the contact reed can pivot from a first position to a second position while remaining in electrical contact with the input pin. The slider is situated such that the other end of the contact reed is normally in electrical contact with a first output pin, held there by magnetic attraction of the permanent magnet to the relay electromagnet. When the electromagnet of the relay is activated, the slider is repelled from the electromagnet, causing the contact reed to be pivoted away from the first contact pin until it stops in electrical contact against a second output pin.

Abstract: A low cost, vibration resistant high frequency switch includes a conductive housing having bores for receiving a center probe, first and second cantilevered side probes, a floating center contact and a dielectric control rod. The center probe includes an axial bore in one end which loosely receives a first end of the low mass, wire shaped axially extending center contact. Adjacent the opposite, second end of the center contact, free ends of the side probe are spaced in a longitudinal direction perpendicular to the axial direction and extend from opposite directions into overlapping relationship with the floating center probe positioned therebetween. A solenoid controls the dielectric control rod which engages the center contact approximately midway along its length to selectively force the second end into engagement with the first or second side contact while maintaining engagement between the first end of the center contact and the center probe.

Abstract: A multiposition microwave switch with a cavity comprising a center and a plurality of spaced radial portions which are narrowed at one end contiguous with the center. For a given number of radial portions, or switch positions, the diameter of the center is thereby made smaller than that which could be achieved by the prior art, and thereby extending the frequency range of the prior art.

Abstract: A solenoid is disclosed which uses a plastic coil bobbin as the bearing surface for the armature, the body of which extends coaxially through the central cylindrical cavity of the bobbin. Extending into this cavity, from the end opposite the armature, is a plug which is rigidly fixed to the bobbin by an outer housing that surrounds the bobbin and has a skirt which captures a flanged end of the plug. A plunger that extends through an axial bore in the plug floats freely, coaxially of the bobbin. The interior end of the plunger has an enlarged head that is received within a bore in the armature body. A bias spring is situated between this plunger head and a counterbore in the plug.

Abstract: A rotating trimmer in a wire trimming machine is shown comprising a cylindrical trunk with a champhered bore for receiving an insulated wire or coaxial cable, and an open midsection for evacuating the trimmed insulation from the wire. The edge of a cutting tool is located in a slot adjacent the midsection to engage and trim the wire. The mass of the trimmer is symmetrically distributed about the longitudinal axis for uniform rotation and trimming.

Abstract: A multiposition microwave switch with a cavity comprising a center and a plurality of radial portions with acutely extended legs. The central coaxial connector selectively communicates with one of a plurality of peripheral connectors, the others being terminated by impedance matching resistors housed in the legs and isolated and shielded from the central connector. The cavity is housed beneath a plurality of pivotal rockers responsive to magnetic actuating means. First and second conductive reeds are spring loaded in the radial portions and legs, respectively, of the cavity and are mechanically responsive to the rockers such that when a first reed is conducting between central and peripheral connectors, its complimentary second reed is shorted to the housing. When the first reed is shorted to the housing, its complimentary second reed terminates the peripheral connector by conducting between it and the resistor.

Abstract: An electronic game simulating a roulette wheel whereby 38 light emitting diodes are circularly disposed. The diodes are sequentially illuminated so that a light appears to move circularly. A pulse generator, including a voltage controlled oscillator, activates a 4-by-10 matrix counter to sequentially light said diodes. A discharging capacitor controls the length of time the pulses are generated. A speaker coupled to the pulse generator simulates the sound of the ball hopping on the roulette wheel.