Patents by Inventor Jesus O. Carrero

Jesus O. Carrero has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of verifying photomask data based on models of etch and lithography processes
    Patent number: 7849423
    Abstract: A photomask dataset corresponding to a target-pattern is verified by simulating a resist-pattern that will be formed in a resist layer by a lithography process, simulating an etched-pattern that will be etched in a layer by a plasma process wherein said simulation comprises calculating a flux of particles impacting a feature, and determining whether the etched-pattern substantially conforms to the target-pattern.
    Type: Grant
    Filed: July 20, 2007
    Date of Patent: December 7, 2010
    Assignee: Cadence Design Systems, Inc.
    Inventors: Bayram Yenikaya, Devendra Joshi, Paul A. Fornari, Jesus O. Carrero, Abdurrahman Sezginer