Abstract: A method for creating a uniformity compensation look-up table is revealed. The method includes the following steps. First measure a plurality of areas on a plane users intend to make uniform to get a measured value of the respective area. Then get a central uniform estimate of a center of the plane. Also get a linear skeleton according to the position of one of the measured values and the position of the central uniform estimate. Next get a plurality of skeletal uniform estimates on the linear skeletons respectively by interpolation or extrapolation of the measured values, the central uniform estimate, and the distance between the position of the measured values and the center of the plane. At last get a plurality of planar uniform estimates on the plane in turn according to the skeletal uniform estimates of the two adjacent linear skeletons to establish the look-up table.