Patents by Inventor Jiam-Hong Chen

Jiam-Hong Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ammonium salt of organic acid and resist composition containing the same
    Publication number: 20020086234
    Abstract: The present invention provides a novel ammonium salt of an organic acid. When the salt is used as a base additive for a chemically amplified resist, the environmental stability of the resist can be enhanced, and the T-top phenomenon can be effectively prevented. In addition, the line width change caused by acid diffusion can be prevented, and the E0 value of the resist can be decreased.
    Type: Application
    Filed: March 9, 2001
    Publication date: July 4, 2002
    Inventors: Sheng-Yueh Chang, Jiam-Hong Chen, Ting-Chun Liu, Tzu-Yu Lin, Wen-Yuang Tsai