Patents by Inventor Jie-Yu ZENG

Jie-Yu ZENG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Error measurement device of linear stage and error measurement method of linear stage
    Patent number: 11335580
    Abstract: An error measurement device and an error measurement method are provided. The optical measurement assembly of the error measurement device includes a light source, an optical lens, and a photoelectric sensor. The light beam emitted by the light source is transmitted to a sensing area on the photoelectric sensor to form a first optical path illuminating on a first light-spot position of the sensing area. The moving stage is moved by a linear displacement, so that the light beam is transmitted to the photoelectric sensor to form a second optical path illuminating on a second light-spot position of the sensing area. The processor calculates a movement error of the moving stage and controls the actuator to drive one or more of the light source, the optical lens, and the photoelectric sensor to perform a relative motion, so that the light beam illuminates on the first light-spot position again.
    Type: Grant
    Filed: October 15, 2020
    Date of Patent: May 17, 2022
    Assignee: NATIONAL CHENG KUNG UNIVERSITY
    Inventors: Chien-Sheng Liu, Jie-Yu Zeng
  • ERROR MEASUREMENT DEVICE OF LINEAR STAGE AND ERROR MEASUREMENT METHOD OF LINEAR STAGE
    Publication number: 20210335643
    Abstract: An error measurement device and an error measurement method are provided. The optical measurement assembly of the error measurement device includes a light source, an optical lens, and a photoelectric sensor. The light beam emitted by the light source is transmitted to a sensing area on the photoelectric sensor to form a first optical path illuminating on a first light-spot position of the sensing area. The moving stage is moved by a linear displacement, so that the light beam is transmitted to the photoelectric sensor to form a second optical path illuminating on a second light-spot position of the sensing area. The processor calculates a movement error of the moving stage and controls the actuator to drive one or more of the light source, the optical lens, and the photoelectric sensor to perform a relative motion, so that the light beam illuminates on the first light-spot position again.
    Type: Application
    Filed: October 15, 2020
    Publication date: October 28, 2021
    Applicant: National Cheng Kung University
    Inventors: Chien-Sheng LIU, Jie-Yu ZENG