Abstract: An advanced process control method using time interval between lots of a particular product to control the weighting of feedback data is described. A plurality of products are fabricated wherein the products are tracked by the process control method based on product type, for example. Variation in a parameter is detected. The adjustment speed of a process recipe is determined based on a time interval weighting wherein the time interval is defined as the time between processing of lots of the same product type. The process recipe is updated at the determined adjustment speed to decrease variation of the parameter.

Abstract: In a three stage non-blocking switching matrix (10), there are originating stages (12), center stages (14), and terminating stages (16). In order to establish matrix connections for either a one input/two output scenario or a two input/one output scenario, a determination must be made as to whether there is a center stage (12) common to all three ports. If so, then the matrix connection is established through the available center stage (12). If there is no common center stage (12) among the three ports, then rearrangement candidates are identified to free up an available center stage. One or more matrix connections are rearranged without affecting live traffic. After rearrangement, the matrix connection for the three ports is established through the freed up center stage (12).