Abstract: An automated gas supply system includes a gas cylinder transfer unit configured to transfer a cradle in which one or more gas cylinders storing a gas therein are stored; a gas cylinder inspection unit configured to check properties of the gas stored in the gas cylinder transferred from the gas cylinder transfer unit and check whether the gas leaks from the gas cylinder; a storage queue configured to receive the gas cylinder from the gas cylinder inspection unit by a mobile robot and configured to classify and store the transferred gas cylinders according to the properties of the gas stored in the gas cylinder; and a gas cabinet configured to receive the gas cylinder from the storage queue by the mobile robot and fasten a gas pipe, which is connected to a semiconductor manufacturing process line, to a gas spray nozzle, which is disposed at one side of the received gas cylinder, to supply the gas stored in the gas cylinder to the semiconductor manufacturing process line, wherein the gas cabinet includes a resid

Abstract: A system for measuring a depth of a stereoscopic image includes a display device displaying a stereoscopic image at a predetermined depth of field; a holographic camera generating an interference pattern image by sensing a wavelength and a phase of light of the stereoscopic image; and a control unit calculating a plurality of modulated image data having image information of the stereoscopic image at each depth of the plurality of depths based on the wavelength and the phase of the light, calculating edges of a field in each of the plurality of modulated image data to obtain edge detection values, calculating a modulated signal by arranging the edge detection values according to a depth in the each of the plurality of modulated image data, calculating a first maximum value of the modulated signal, and calculating a first depth corresponding to the first maximum value as the depth of field.

Abstract: A microwave discharge lamp includes a discharge bulb which is discharged by a microwave and emits a light, a cylindrical resonant cavity which has at least a portion formed of a conductive mesh of net structure and is disposed to cover the discharge bulb, a main antenna which has one end supplied with microwave power through a bottom surface of the resonant cavity and the other end electrically contacting a side surface of the resonant cavity to be grounded, and a dummy antenna which has one end electrically grounded to the bottom surface of the resonant cavity and the other end electrically grounded to the side surface of the resonant cavity and is disposed opposite to the main antenna to be symmetrical to the main antenna about a central axis of the resonant cavity.

Abstract: A microwave discharge lamp includes a discharge bulb which is discharged by a microwave and emits a light, a cylindrical resonant cavity which has at least a portion formed of a conductive mesh of net structure and is disposed to cover the discharge bulb, a main antenna which has one end supplied with microwave power through a bottom surface of the resonant cavity and the other end electrically contacting a side surface of the resonant cavity to be grounded, and a dummy antenna which has one end electrically grounded to the bottom surface of the resonant cavity and the other end electrically grounded to the side surface of the resonant cavity and is disposed opposite to the main antenna to be symmetrical to the main antenna about a central axis of the resonant cavity.

Abstract: Provided are a plasma generation apparatus and a plasma generation method. The plasma generation apparatus includes a chamber including a dielectric window and a toroidal discharge space, a magnetic core disposed to surround a portion of the chamber, an induction coil disposed to wind the magnetic core, and a waveguide radiating a microwave through the dielectric window. Alternating current flowing in the induction coil forms a magnetic flux at the magnetic core, and the magnetic flux generates inductively-coupled plasma. A microwave propagating along the waveguide generates microwave plasma inside the chamber.

Abstract: Provided is a microwave plasma discharge lamp apparatus which includes a rectangular waveguide having a rectangular shape one end of which is closed and the other end is open and receiving a microwave through an opening to put out linearly polarized microwaves; a discharge lamp; a resonator cavity, formed in a cylindrical shape, one end of which is open, which is disposed to surround the discharge lamp, and which is made of a conductive mesh, thereby allowing the passage of the light from the discharge lamp; and a phase shifter, which has a cross-shaped waveguide opened in a propagation direction of the linearly polarized microwaves, is disposed between the other end of the rectangular waveguide and one end of the resonator cavity, and receives the linearly polarized microwaves from the rectangular waveguide to generate elliptically polarized microwaves in the cylindrical resonator cavity. The elliptically polarized microwaves discharge the discharge lamp.

Abstract: Provided is a microwave plasma discharge lamp apparatus which includes a rectangular waveguide having a rectangular shape one end of which is closed and the other end is open and receiving a microwave through an opening to put out linearly polarized microwaves; a discharge lamp; a resonator cavity, formed in a cylindrical shape, one end of which is open, which is disposed to surround the discharge lamp, and which is made of a conductive mesh, thereby allowing the passage of the light from the discharge lamp; and a phase shifter, which has a cross-shaped waveguide opened in a propagation direction of the linearly polarized microwaves, is disposed between the other end of the rectangular waveguide and one end of the resonator cavity, and receives the linearly polarized microwaves from the rectangular waveguide to generate elliptically polarized microwaves in the cylindrical resonator cavity. The elliptically polarized microwaves discharge the discharge lamp.

Abstract: Provided are a plasma generation apparatus and a plasma generation method. The plasma generation apparatus includes a chamber including a dielectric window and a toroidal discharge space, a magnetic core disposed to surround a portion of the chamber, an induction coil disposed to wind the magnetic core, and a waveguide radiating a microwave through the dielectric window. Alternating current flowing in the induction coil forms a magnetic flux at the magnetic core, and the magnetic flux generates inductively-coupled plasma. A microwave propagating along the waveguide generates microwave plasma inside the chamber.

Abstract: An active YIG oscillator driving device is comprised of: an YIG oscillator including a main coil, an FM coil, a frequency generator operating to generate an output frequency in response to a magnetic field generated from the FM coil; a phase locker setting the output frequency to a target frequency by controlling an amount of current provided into the FM coil and adjusting the output frequency; and a main coil controller regulating the amount of current provided into the main coil, if the output frequency varies out of a controllable range by the FM coil, and adjusting the output frequency. A time for setting the output frequency of the YIG oscillator is shortened to improve the stability of the output frequency thereof against environmental conditions.

Abstract: An active YIG oscillator driving device is comprised of: an YIG oscillator including a main coil, an FM coil, a frequency generator operating to generate an output frequency in response to a magnetic field generated from the FM coil; a phase locker setting the output frequency to a target frequency by controlling an amount of current provided into the FM coil and adjusting the output frequency; and a main coil controller regulating the amount of current provided into the main coil, if the output frequency varies out of a controllable range by the FM coil, and adjusting the output frequency. A time for setting the output frequency of the YIG oscillator is shortened to improve the stability of the output frequency thereof against environmental conditions.

Abstract: A non-rotating electrodeless high-intensity discharge lamp system using circularly polarized microwaves. The lamp system has a first rectangular waveguide to propagate linearly polarized microwaves generated from a microwave source; an input circular waveguide linearly connected to the first rectangular waveguide; a second rectangular waveguide closed at an end thereof, and perpendicularly connected to a circumferential surface of the input circular waveguide; an elliptical waveguide linearly connected to the input circular waveguide such that the major axis of the elliptical waveguide is rotated to a predetermined angle relative to a horizontal surface of the input rectangular waveguide; a second circular waveguide linearly connected to the elliptical waveguide; and a discharge lamp housed in a mesh cover, and supported by the second circular waveguide while being held on a reflecting mirror.

Abstract: A non-rotating electrodeless high-intensity discharge lamp system using circularly polarized microwaves is herein disclosed. In an embodiment, the lamp system has a first rectangular waveguide (1) to propagate linearly polarized microwaves generated from a microwave source; an input circular waveguide (2) linearly connected to the first rectangular waveguide; a second rectangular waveguide (3) closed at an end thereof, and perpendicularly connected to a circumferential surface of the input circular waveguide; an elliptical waveguide (4) linearly connected to the input circular waveguide such that the major axis of the elliptical waveguide is rotated to a predetermined angle relative to a horizontal surface (or the wider surface) of the input rectangular waveguide; a second circular waveguide (6) linearly connected to the elliptical waveguide; and a discharge lamp (5) housed in a mesh cover (7), and supported by the second circular waveguide while being held on a reflecting mirror (9).

Abstract: The present invention relates to a bulb for the electrodes discharge lamp, which, for the purpose of completely blocking the diffusion of heat caused by the convection of air from contact with the discharge bulb or other ways of transfer of heat, is equipped with another, external bulb to contain the discharge bulb inside but removed from it by a vacuous space in-between, and has a reflector formed by coating some of the outer surface of the external bulb for condensation or throw-back of light, whereby dispensing with attachment of a separate lamp shade. In the present invention, the discharge bulb to be contained in the above-said external lamp can be in a plural number so that sources of light of high brightness may be provided, and the external lamp also can be structured in plural numbers so that a variety of uses may satisfactorily be made of.

Abstract: A high temperature superconductor bearing is disclosed which provide a strong levitation force and thus enable the construction of a horizontal-axle flywheel energy storage system. The bearing includes a magnet journal made of high temperature superconductor films, and a stator formed of a plurality of high temperature superconductors installed opposite to the high temperature superconductor magnet journal or the magnet journal for thereby off-setting the force such as the weight applied to the rotor using a magnetic pressure.

Abstract: A high temperature superconductor bearing is disclosed which provide a strong levitation force and thus enable the construction of a horizontal-axle flywheel energy storage system. The bearing includes a magnet journal made of high temperature superconductor films, and a stator formed of a plurality of high temperature superconductors installed opposite to the high temperature superconductor magnet journal or the magnet journal for thereby off-setting the force such as the weight applied to the rotor using a magnetic pressure.