Patents by Inventor Jin-kyu So

Jin-kyu So has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • AUTOMATED GAS SUPPLY SYSTEM
    Publication number: 20240116184
    Abstract: An automated gas supply system includes a gas cylinder transfer unit configured to transfer a cradle in which one or more gas cylinders storing a gas therein are stored; a gas cylinder inspection unit configured to check properties of the gas stored in the gas cylinder transferred from the gas cylinder transfer unit and check whether the gas leaks from the gas cylinder; a storage queue configured to receive the gas cylinder from the gas cylinder inspection unit by a mobile robot and configured to classify and store the transferred gas cylinders according to the properties of the gas stored in the gas cylinder; and a gas cabinet configured to receive the gas cylinder from the storage queue by the mobile robot and fasten a gas pipe, which is connected to a semiconductor manufacturing process line, to a gas spray nozzle, which is disposed at one side of the received gas cylinder, to supply the gas stored in the gas cylinder to the semiconductor manufacturing process line, wherein the gas cabinet includes a resid
    Type: Application
    Filed: December 20, 2023
    Publication date: April 11, 2024
    Applicant: Samsung Electronics Co., Ltd.
    Inventors: Min Sung HA, Kwang-Jun KIM, Jong Kyu KIM, Hyun-Joong KIM, Jin Ho SO, Chi-Gun AN, Ki Moon LEE, Hui Gwan LEE, Beom Soo HWANG
  • Electron beam focusing electrode and electron gun using the same
    Patent number: 8912505
    Abstract: An electron beam focusing electrode and an electron gun using the same may include a plate having a polygonal through-hole; at least a projecting portion formed on at least one side of the through-hole. By using the electron beam focusing electrode, a spreading phenomenon of an electron beam having a rectangular cross section may be reduced. Further, the output of the electron gun may be increased, and electron beams may be easily focused.
    Type: Grant
    Filed: October 4, 2012
    Date of Patent: December 16, 2014
    Assignees: Samsung Electronics Co., Ltd., Seoul National University Industry Foundation
    Inventors: Chan Wook Baik, Anurag Srivastava, Jong Min Kim, Sun Il Kim, Young Mok Son, Gun Sik Park, Jin Kyu So
  • Electron beam focusing electrode and electron gun using the same
    Patent number: 8304743
    Abstract: An electron beam focusing electrode and an electron gun using the same may include a plate having a polygonal through-hole; at least a projecting portion formed on at least one side of the through-hole. By using the electron beam focusing electrode, a spreading phenomenon of an electron beam having a rectangular cross section may be reduced. Further, the output of the electron gun may be increased, and electron beams may be easily focused.
    Type: Grant
    Filed: October 10, 2008
    Date of Patent: November 6, 2012
    Assignees: Samsung Electronics Co., Ltd., Seoul National University Industry Foundation
    Inventors: Chan Wook Baik, Anurag Srivastava, Jong Min Kim, Sun Il Kim, Young Mok Son, Gun Sik Park, Jin Kyu So
  • Electron beam focusing electrode and electron gun using the same
    Publication number: 20090289542
    Abstract: An electron beam focusing electrode and an electron gun using the same may include a plate having a polygonal through-hole; at least a projecting portion formed on at least one side of the through-hole. By using the electron beam focusing electrode, a spreading phenomenon of an electron beam having a rectangular cross section may be reduced. Further, the output of the electron gun may be increased, and electron beams may be easily focused.
    Type: Application
    Filed: October 10, 2008
    Publication date: November 26, 2009
    Inventors: Chan Wook Baik, Anurag Srivastava, Jong Min Kim, Sun Il Kim, Young Mok Son, Gun Sik Park, Jin Kyu So
  • Mask used for LIGA process, method of manufacturing the mask, and method of manufacturing microstructure using LIGA process
    Patent number: 7609805
    Abstract: A mask used for a Lithographie, Galvanofomung, and Abformung (LIGA) process, a method for manufacturing the mask, and a method for manufacturing a microstructure using a LIGA process.
    Type: Grant
    Filed: August 30, 2007
    Date of Patent: October 27, 2009
    Assignees: Samsung Electronics Co., Ltd., Seoul National University Industry Foundation
    Inventors: Chan-wook Baik, Yong-wan Jin, Gun-sik Park, Jong-min Kim, Young-min Shin, Jin-kyu So
  • Mask used for LIGA process, method of manufacturing the mask, and method of manufacturing microstructure using LIGA process
    Publication number: 20080166640
    Abstract: A mask used for a Lithographie, Galvanofomung, and Abformung (LIGA) process, a method for manufacturing the mask, and a method for manufacturing a microstructure using a LIGA process.
    Type: Application
    Filed: August 30, 2007
    Publication date: July 10, 2008
    Inventors: Chan-wook Baik, Yong-wan Jin, Gun-sik Park, Jong-min Kim, Young-min Shin, Jin-kyu So