Patents by Inventor Jingli HUANG

Jingli HUANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Silicon wafer edge protection device with collision protection function
    Patent number: 10041548
    Abstract: A wafer edge protection apparatus, including an electrical control module having a servomotor, a vertical motion mechanism and a protection mechanism. The protection mechanism includes: a shaft coupler, in fixed connection with a shaft of the servomotor and having a plurality of first connecting components; and a transmission sleeve, in fixed connection with the vertical motion mechanism and having a plurality of second connecting components in movable connection with the plurality of first connecting components.
    Type: Grant
    Filed: December 26, 2014
    Date of Patent: August 7, 2018
    Assignee: Shanghai Micro Electronics Equipment (Group) Co., Ltd.
    Inventors: Jingli Huang, Yuebin Zhu
  • SILICON WAFER EDGE PROTECTION DEVICE WITH COLLISION PROTECTION FUNCTION
    Publication number: 20160341256
    Abstract: A wafer edge protection apparatus, including an electrical control module having a servomotor, a vertical motion mechanism and a protection mechanism. The protection mechanism includes: a shaft coupler, in fixed connection with a shaft of the servomotor and having a plurality of first connecting components; and a transmission sleeve, in fixed connection with the vertical motion mechanism and having a plurality of second connecting components in movable connection with the plurality of first connecting components.
    Type: Application
    Filed: December 26, 2014
    Publication date: November 24, 2016
    Inventors: Jingli HUANG, Yuebin ZHU