Abstract: A method for manufacturing a sensor. The sensor includes a sensing element and a housing, the housing including an interior space, which is accessible through a housing opening, and the sensing element being situated in the interior space and being designed to detect a property and/or a composition of an ambient medium of the sensor. The method includes filling the interior space with a protective medium through the housing opening, the protective medium being designed to transfer the property and/or the composition of the ambient medium to the sensing element; fixing a preferably flexible diaphragm at or in the housing opening preferably for sealing the housing opening, the diaphragm including at least one diaphragm opening; and sealing the at least one diaphragm opening. A sensor, which is manufactured according to this method, is also described.

Abstract: A production method for a micromechanical sensor apparatus. The method includes: providing a bonded wafer stack comprising an ASIC wafer and a MEMS wafer, the ASIC wafer including ASIC switching devices and the MEMS wafer including MEMS sensor devices, an ASIC switching device and a corresponding MEMS sensor device are arranged one above the other such that they form a respective micromechanical sensor apparatus in the bonded wafer stack; providing a first packaging wafer having first front and rear faces; in the first rear face, the first packaging wafer has blind holes assigned to corresponding sensor detection regions of a respective MEMS sensor device; bonding the first rear face to the wafer stack such that the blind holes are each in fluid connection with the corresponding sensor detection region; backthinning, on the first front face, the first packaging wafer bonded to the wafer stack to expose the blind holes.

Abstract: A method for manufacturing a pressure sensor having a pressure-sensitive medium. The method includes: providing a pressure sensor having a pressure sensor element, which is arranged in a receiving space of a housing of the pressure sensor; filling the receiving space with a pressure-sensitive medium; applying a second medium, which is immiscible with the pressure-sensitive medium, to a surface of the pressure-sensitive medium; forming a membrane in a boundary region between the pressure-sensitive medium and the second medium by way of a phase-transfer reaction between a first reactant and a second reactant, at least the first reactant or the second reactant being dissolved in the pressure-sensitive medium or in the second medium. A pressure sensor manufactured by the method is also described.

Abstract: A sensor includes a sensing element for detecting a property and/or a composition of a surrounding medium of the sensor, a transmission medium for transmitting a property and/or a composition of the surroundings medium onto the sensing element, the transmission medium being situated in such a way that the transmission medium is applied to the sensing element, and a cover, which distances the transmission medium from the surrounding medium, the cover being manufactured from a self-healing material, in particular, the cover being designed as a flexible membrane which is made up of a self-healing material.

Abstract: A method for assessing the state of a sensor. The sensor comprises a deflectable micromechanical sensor structure for detecting a physical input variable and converting the physical input variable into an electrical sensor signal. A medium surrounding the sensor acts on the micromechanical sensor structure. The micromechanical sensor structure is deflectable using an excitation signal. The method includes: generating an excitation signal using a driver unit; outputting the excitation signal to the micromechanical sensor structure; deflecting the micromechanical sensor structure using the excitation signal; detecting a response behavior of the micromechanical sensor structure in response to the excitation signal; comparing the response behavior to a reference behavior to determine a measure of deviation for the response behavior in relation to the reference behavior; and assessing, based on the measure of deviation, the state of the sensor with respect to the presence of a deposit.

Abstract: A pressure sensor includes a micromechanical sensor element including a pressure-sensitive diaphragm, which spans a cavity in a base material and includes a diaphragm electrode. A fixed counter electrode is situated inside the cavity and, with the diaphragm electrode, forms a first measuring capacitor for detecting a first measuring pressure. A reference capacitor is situated inside the cavity and includes a first and a second fixed reference electrode. The pressure sensor is operable in a first operating mode, in which the first measuring capacitor and the first reference capacitor are interconnected in a first bridge circuit. The pressure sensor is operable in a second operating mode, in which the diaphragm electrode, the counter electrode and the reference electrodes are interconnected in such a way that the diaphragm electrode, together with the at least one first reference electrode, forms a second measuring capacitor for detecting a second measuring pressure.

Abstract: A pressure sensor includes a micromechanical sensor element including a pressure-sensitive diaphragm, which spans a cavity in a base material and includes a diaphragm electrode. A fixed counter electrode is situated inside the cavity and, with the diaphragm electrode, forms a first measuring capacitor for detecting a first measuring pressure. A reference capacitor is situated inside the cavity and includes a first and a second fixed reference electrode. The pressure sensor is operable in a first operating mode, in which the first measuring capacitor and the first reference capacitor are interconnected in a first bridge circuit. The pressure sensor is operable in a second operating mode, in which the diaphragm electrode, the counter electrode and the reference electrodes are interconnected in such a way that the diaphragm electrode, together with the at least one first reference electrode, forms a second measuring capacitor for detecting a second measuring pressure.

Abstract: A sensor. The sensor include a sensing element for detecting a property and/or a composition of a surrounding medium of the sensor; a transmission medium for transmitting a property and/or a composition of the surroundings medium onto the sensing element, the transmission medium being situated in such a way that the transmission medium is applied to the sensing element; and a cover, which distances the transmission medium from the surrounding medium, the cover being manufactured from a self-healing material, in particular, the cover being designed as a flexible membrane.