Patents by Inventor Joachim N. Burghartz

Joachim N. Burghartz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11257915
    Abstract: A semiconductor element includes an enhancement-type transistor structure with a layer construction including a base substrate, a first semiconductor layer, and a second semiconductor layer, which are arranged one on top of the other along a first direction. The transistor structure further has a source electrode, a gate electrode, and a drain electrode, which are spaced apart from one another along a second direction that is transverse to the first direction. The first and second semiconductor layers are formed by different group III nitride materials, such that a 2D electron gas forms in a boundary region of the first and second semiconductor layers. The first and second semiconductor layers have holes in the region of the gate electrode, between which holes multiple fins including the group III nitride materials remain. The gate electrode has a plurality of gate fingers extending into the holes.
    Type: Grant
    Filed: May 6, 2020
    Date of Patent: February 22, 2022
    Assignee: Institut für Mikroelektronik Stuttgart
    Inventors: Joachim N. Burghartz, Mohammed Alomari, Muhammad Alshahed
  • Publication number: 20200373399
    Abstract: A semiconductor element includes an enhancement-type transistor structure with a layer construction including a base substrate, a first semiconductor layer, and a second semiconductor layer, which are arranged one on top of the other along a first direction. The transistor structure further has a source electrode, a gate electrode, and a drain electrode, which are spaced apart from one another along a second direction that is transverse to the first direction. The first and second semiconductor layers are formed by different group III nitride materials, such that a 2D electron gas forms in a boundary region of the first and second semiconductor layers. The first and second semiconductor layers have holes in the region of the gate electrode, between which holes multiple fins including the group III nitride materials remain. The gate electrode has a plurality of gate fingers extending into the holes.
    Type: Application
    Filed: May 6, 2020
    Publication date: November 26, 2020
    Inventors: Joachim N. BURGHARTZ, Mohammed ALOMARI, Muhammad ALSHAHED
  • Patent number: 8508038
    Abstract: A semiconductor substrate having a first lateral dimension is combined with a flexible film piece having a second lateral dimension by arranging the semiconductor substrate in a recess of the film piece. The semiconductor substrate has circuit structures produced using lithography process steps. After the semiconductor substrate has been arranged in the recess of the film piece, a patterned layer of an electrically conductive material is produced above the semiconductor substrate and the film piece using lithography process steps. The patterned layer extends from the semiconductor substrate up to the flexible film piece and forms a number of electrically conductive contact tracks between the semiconductor substrate and the film piece.
    Type: Grant
    Filed: January 5, 2012
    Date of Patent: August 13, 2013
    Assignee: Institut fuer Mikroelektronik Stuttgart
    Inventors: Joachim N. Burghartz, Christine Harendt
  • Patent number: 8466037
    Abstract: In a method for producing a very thin chip including an integrated circuit, a circuit structure is produced in a defined section of a semiconductor wafer. The defined wafer section is subsequently released from the semiconductor wafer. For this purpose, the wafer section is firstly freed such that it is held only via local web-like connections on the remaining semiconductor wafer, which web-like connections are arranged at a lateral periphery of the wafer section. The web-like connections are subsequently severed.
    Type: Grant
    Filed: September 11, 2008
    Date of Patent: June 18, 2013
    Assignee: Institut fuer Mikroelektronik Stuttgart
    Inventors: Joachim N. Burghartz, Wolfgang Appel, Martin Zimmermann
  • Patent number: 8309924
    Abstract: A circuit arrangement for generating light-dependent and temperature-dependent signals has a number of first and second sensor elements, which generate a number of first and second electrical signals. The first and second electrical signals depend on electromagnetic radiation impinging on the circuit arrangement. The first sensor elements are designed to generate the first electrical signals in a manner dependent on electromagnetic radiation from a first wavelength range which comprises a substantial part of the visible light. The second sensor elements are designed to generate the second electrical signals in a manner dependent on electromagnetic radiation from a second wavelength range which predominantly comprises infrared radiation. The first wavelength range overlaps the second wavelength range and it therefore also comprises infrared radiation.
    Type: Grant
    Filed: May 4, 2010
    Date of Patent: November 13, 2012
    Assignee: Institut fuer Mikroelektronik Stuttgart
    Inventors: Joachim N. Burghartz, Franz Xaver Hutter, Daniel Brosch, Heinz-Gerhard Graf
  • Publication number: 20120161293
    Abstract: A semiconductor substrate having a first lateral dimension is combined with a flexible film piece having a second lateral dimension by arranging the semiconductor substrate in a recess of the film piece. The semiconductor substrate has circuit structures produced using lithography process steps. After the semiconductor substrate has been arranged in the recess of the film piece, a patterned layer of an electrically conductive material is produced above the semiconductor substrate and the film piece using lithography process steps. The patterned layer extends from the semiconductor substrate up to the flexible film piece and forms a number of electrically conductive contact tracks between the semiconductor substrate and the film piece.
    Type: Application
    Filed: January 5, 2012
    Publication date: June 28, 2012
    Inventors: Joachim N. Burghartz, Christine Harendt
  • Patent number: 7951691
    Abstract: In a method for producing a thin film chip including an integrated circuit, a semi-conductor wafer having a first surface is provided. At least one cavity is produced under a defined section of the first surface by means of porous silicon. A circuit structure is produced in the defined section. The defined wafer section is subsequently released from the semiconductor wafer by severing local web-like connections, which hold the wafer section above the cavity and on the remaining semiconductor wafer.
    Type: Grant
    Filed: September 11, 2008
    Date of Patent: May 31, 2011
    Assignee: Institut fuer Mikroelektronik Stuttgart
    Inventors: Joachim N. Burghartz, Martin Zimmermann, Wolfgang Appel
  • Publication number: 20100278212
    Abstract: A circuit arrangement for generating light-dependent and temperature-dependent signals has a number of first and second sensor elements, which generate a number of first and second electrical signals. The first and second electrical signals depend on electromagnetic radiation impinging on the circuit arrangement. The first sensor elements are designed to generate the first electrical signals in a manner dependent on electromagnetic radiation from a first wavelength range which comprises a substantial part of the visible light. The second sensor elements are designed to generate the second electrical signals in a manner dependent on electromagnetic radiation from a second wavelength range which predominantly comprises infrared radiation. The first wavelength range overlaps the second wavelength range and it therefore also comprises infrared radiation.
    Type: Application
    Filed: May 4, 2010
    Publication date: November 4, 2010
    Inventors: Joachim N. BURGHARTZ, Franz Xaver Hutter, Daniel Brosch, Heinz-Gerhard Graf
  • Publication number: 20090098708
    Abstract: In a method for producing a very thin chip including an integrated circuit, a circuit structure is produced in a defined section of a semiconductor wafer. The defined wafer section is subsequently released from the semiconductor wafer. For this purpose, the wafer section is firstly freed such that it is held only via local web-like connections on the remaining semiconductor wafer, which web-like connections are arranged at a lateral periphery of the wafer section. The web-like connections are subsequently severed.
    Type: Application
    Filed: September 11, 2008
    Publication date: April 16, 2009
    Inventors: Joachim N. BURGHARTZ, Wolfgang APPEL, Martin ZIMMERMANN
  • Publication number: 20090096089
    Abstract: In a method for producing a thin film chip including an integrated circuit, a semi-conductor wafer having a first surface is provided. At least one cavity is produced under a defined section of the first surface by means of porous silicon. A circuit structure is produced in the defined section. The defined wafer section is subsequently released from the semiconductor wafer by severing local web-like connections, which hold the wafer section above the cavity and on the remaining semiconductor wafer.
    Type: Application
    Filed: September 11, 2008
    Publication date: April 16, 2009
    Inventors: Joachim N. BURGHARTZ, Martin Zimmermann, Wolfgang Appel
  • Patent number: 5583059
    Abstract: A SiGe-HBT structure for device integration on thin-SOI substrates is disclosed. The emitter and base regions are vertical while the collector contact is lateral in the otherwise MOS-like device structure. This allows one to integrate a SiGe base, the device capacitances are reduced, and the transistor can be combined with fully-depleted CMOS in a SOI-BiCMOS technology.
    Type: Grant
    Filed: June 1, 1994
    Date of Patent: December 10, 1996
    Assignee: International Business Machines Corporation
    Inventor: Joachim N. Burghartz
  • Patent number: 5461250
    Abstract: A dual gate thin film or SOI MOSFET device having a sufficiently thin body thickness with one or more semiconductor channel layer(s) sandwiched by semiconductor layers having a different energy band structure to automatically confine carriers to the channel layer(s) without the need for channel grading or modulation doping. Preferred embodiments employ strained layer epitaxy having Si/SiGe/Si or SiGe/Si/SiGe semiconductor layers.
    Type: Grant
    Filed: August 10, 1992
    Date of Patent: October 24, 1995
    Assignee: International Business Machines Corporation
    Inventors: Joachim N. Burghartz, Bernard S. Meyerson, Yuan-Chen Sun
  • Patent number: 5059544
    Abstract: Selective and non-selective epitaxial growth is utilized to form a bipolar transistor having self-aligned emitter and base regions. A substrate of semiconductor material of a first conductivity type is provided and a first layer of semiconductor material of a second conductivity type is non-selectively epitaxially grown on the substrate. An insulating element is formed on a portion of the first layer of semiconductor material and a second layer of semiconductor material of the second conductivity type is selectively epitaxially grown on the first layer such that a portion of the second layer laterally overgrows onto an upper surface of the insulating element. The lateral overgrowth forms an aperture in the second layer to expose a region of the upper surface of insulating element. A layer of insulating material is formed on the second layer to isolate the second layer of semiconductor material from a subsequent deposition of conductive material.
    Type: Grant
    Filed: July 14, 1988
    Date of Patent: October 22, 1991
    Assignee: International Business Machines Corp.
    Inventors: Joachim N. Burghartz, Barry J. Ginsberg, Siegfried Mader