Patents by Inventor Joannes Hendricus Maria Van Oers

Joannes Hendricus Maria Van Oers has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Heat transfer assembly, lithographic apparatus and manufacturing method
    Patent number: 8502960
    Abstract: A lithographic apparatus includes a heat transfer assembly configured to temperature control at least a portion of the lithographic apparatus. The heat transfer assembly includes a printed circuit board, and a plurality of heat transfer elements. The printed circuit board and the plurality of heat transfer elements are configured to be attached to the portion of the lithographic apparatus. The plurality of heat transfer elements are separate from and are electrically coupled to the printed circuit board.
    Type: Grant
    Filed: July 12, 2010
    Date of Patent: August 6, 2013
    Assignee: ASML Netherlands B.V.
    Inventors: Eugene Maria Brinkhof, Joannes Hendricus Maria Van Oers, Robertus Adolphus Maria Kuipers, Vasco Francisco Bovée
  • HEAT TRANSFER ASSEMBLY, LITHOGRAPHIC APPARATUS AND MANUFACTURING METHOD
    Publication number: 20110007288
    Abstract: A lithographic apparatus includes a heat transfer assembly configured to temperature control at least a portion of the lithographic apparatus. The heat transfer assembly includes a printed circuit board, and a plurality of heat transfer elements. The printed circuit board and the plurality of heat transfer elements are configured to be attached to the portion of the lithographic apparatus. The plurality of heat transfer elements are separate from and are electrically coupled to the printed circuit board.
    Type: Application
    Filed: July 12, 2010
    Publication date: January 13, 2011
    Applicant: ASML Netherlands B.V.
    Inventors: Eugene Maria Brinkhof, Joannes Hendricus Maria Van Oers, Robertus Adolphus Maria Kuipers, Vasco Francisco Bovée