Patents by Inventor Joe Mosca

Joe Mosca has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods and apparatus for the in-process detection of workpieces with a physical contact probe
    Patent number: 5834645
    Abstract: An apparatus for detecting the presence of extraneous material on a polishing pad during a chemical mechanical planarization (CMP) process uses a contact probe assembly. The contact probe assembly interrogates the surface of the polishing pad during processing of a workpiece and generates a control signal indicating the presence of extraneous material when the displacement of a contact stylus exceeds a threshold amount. The contact probe assembly produces a control signal in response to the detection of extraneous material and the control signal causes the CMP system to react in an appropriate manner to reduce damage to the workpieces being processed.
    Type: Grant
    Filed: July 10, 1997
    Date of Patent: November 10, 1998
    Assignee: Speedfam Corporation
    Inventors: Anthony Bartels, Bob Allen, Chris Karlsrud, Joe Mosca