Patents by Inventor Joerg Specht

Joerg Specht has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device and method for controlling positioning of multiple adjustable mirror elements in a multi-mirror arrangement
    Patent number: 10018803
    Abstract: An external facility is used to control positioning of multiple displaceable mirror elements of a multi-mirror arrangement. The external facility is to a multi-mirror arrangement via a data channel having a bandwidth of at least 1 kHz per controlled degree of freedom of displacement.
    Type: Grant
    Filed: October 24, 2016
    Date of Patent: July 10, 2018
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Jan Horn, Markus Holz, Joerg Specht, Johannes Eisenmenger, Stefan Krone
  • Device for determining a tilt angle of at least one mirror of a lithography system, and method
    Patent number: 10007195
    Abstract: An apparatus for establishing a tilt angle of at least one mirror of a lithography installation is disclosed. The apparatus includes a pattern generating device (6) for generating a pattern. The apparatus also includes an image acquisition device for acquiring the generated pattern which was reflected by the mirror. The apparatus further includes a comparator device for providing a comparison result in a manner dependent on a comparison of the acquired pattern with a reference pattern. In addition, the apparatus includes an evaluation device for establishing the tilt angle in a manner dependent on the comparison result. The image acquisition device and the comparator device are provided in the same integrated circuit.
    Type: Grant
    Filed: May 3, 2016
    Date of Patent: June 26, 2018
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Jan Horn, Markus Holz, Joerg Specht
  • DEVICE AND METHOD FOR CONTROLLING POSITIONING OF MULTIPLE ADJUSTABLE MIRROR ELEMENTS IN A MULTI-MIRROR ARRANGEMENT
    Publication number: 20170038555
    Abstract: An external facility is used to control positioning of multiple displaceable mirror elements of a multi-mirror arrangement. The external facility is to a multi-mirror arrangement via a data channel having a bandwidth of at least 1 kHz per controlled degree of freedom of displacement.
    Type: Application
    Filed: October 24, 2016
    Publication date: February 9, 2017
    Inventors: Jan Horn, Markus Holz, Joerg Specht, Johannes Eisenmenger, Stefan Krone
  • DEVICE FOR DETERMINING A TILT ANGLE OF AT LEAST ONE MIRROR OF A LITHOGRAPHY SYSTEM, AND METHOD
    Publication number: 20160246186
    Abstract: An apparatus for establishing a tilt angle of at least one mirror of a lithography installation is disclosed. The apparatus includes a pattern generating device (6) for generating a pattern. The apparatus also includes an image acquisition device for acquiring the generated pattern which was reflected by the mirror. The apparatus further includes a comparator device for providing a comparison result in a manner dependent on a comparison of the acquired pattern with a reference pattern. In addition, the apparatus includes an evaluation device for establishing the tilt angle in a manner dependent on the comparison result. The image acquisition device and the comparator device are provided in the same integrated circuit.
    Type: Application
    Filed: May 3, 2016
    Publication date: August 25, 2016
    Inventors: Jan Horn, Markus Holz, Joerg Specht