Abstract: A valve for a vacuum apparatus includes a first housing element and a second housing element wherein an outer chamber is defined by the first housing element and the second housing element. The first housing element has a first opening and the second housing element has a second opening in fluid communication with the first opening via the outer chamber. An inner chamber is defined by the first housing element and the second housing element wherein a membrane is disposed in the inner chamber. A sealing element is connected to the membrane and is moveable from a first position to a second position wherein in the first position the sealing element closes the first opening in a leak-tight manner and in the second position the sealing element opens the first opening to allow a gaseous medium to flow through the valve.

Abstract: Seal for a vacuum valve comprising a circular base element, wherein the base element has a non-circular cross-section having an outer side extending in an axial direction and an inner side extending radially such that the inner side of the seal can be clampingly fixed in a sealing element of a valve. Further, the present invention relates to a sealing element, such a seal and a valve with such a sealing element.

Abstract: A valve for a vacuum apparatus includes a first housing element and a second housing element wherein an outer chamber is defined by the first housing element and the second housing element. The first housing element has a first opening and the second housing element has a second opening in fluid communication with the first opening via the outer chamber. An inner chamber is defined by the first housing element and the second housing element wherein a membrane is disposed in the inner chamber. A sealing element is connected to the membrane and is moveable from a first position to a second position wherein in the first position the sealing element closes the first opening in a leak-tight manner and in the second position the sealing element opens the first opening to allow a gaseous medium to flow through the valve.