Abstract: A production method for a MEMS component includes providing a layer arrangement on a carrier substrate, where the layer arrangement includes a first and second layer structure. A sacrificial material is arranged in an intermediate region between the first and second layer structures, an etch stop structure extending between the first and second layer structures subdivides the intermediate region into an exposure region and an edge region laterally adjoining the exposure region, and at least one of the first layer structure or the second layer structure has access openings to the exposure region. The method further includes removing the sacrificial material from the exposure region through the access openings using an etching process to expose the exposure region. The etch stop structure provides a lateral delimitation for the etching process, and the sacrificial material present in the edge region provides a mechanical connection between the first and second layer structures.

Abstract: In accordance with an embodiment, a MEMS microphone includes a sound detection unit having a first membrane, a second membrane arranged at a distance from the first membrane, a low-pressure region arranged between the first membrane and the second membrane, a gas pressure that is reduced in relation to normal pressure being present in said low-pressure region, a counter electrode arranged in the low-pressure region, and a sound through-hole, which extends through the sound detection unit in a thickness direction of the sound detection unit; and a valve provided at the sound through-hole, said valve being configured to adopt a plurality of valve states, wherein a predetermined degree of transmission of the sound through-hole to sound is assigned to each valve state

Abstract: A production method for a double-membrane MEMS component includes: providing a layer arrangement on a carrier substrate, wherein the layer arrangement comprises a first membrane structure, a sacrificial material layer adjoining the first membrane structure, and a counterelectrode structure in the sacrificial material layer and at a distance from the first membrane structure, wherein at least one through opening is formed in the sacrificial material layer as far as the first membrane structure; forming a filling material structure in the at least one through opening by applying a first filling material layer on the wall region of the at least one through opening; applying a second membrane structure on the layer arrangement with the sacrificial material; and removing the sacrificial material from an intermediate region to expose the filling material structure in the intermediate region.

Abstract: In accordance with an embodiment, microelectromechanical microphone includes a holder and a sound detection unit carried on the holder. The sound detection unit includes a planar first membrane, a planar second membrane arranged at a distance from the first membrane, a low-pressure chamber formed between the first membrane and the second membrane, a reduced gas pressure relative to normal pressure being present in the low-pressure chamber, a reference electrode arranged at least in sections in the low-pressure chamber, where the first and second membranes are displaceable relative to the reference electrode by sound waves to be detected, the reference electrode includes a planar base section and a stiffening structure provided on the base section, and the stiffening structure is provided on a side of the base section that faces the first membrane or/and on a side of the base section that faces the second membrane.

Abstract: A microelectromechanical systems (MEMS) package assembly and a method of manufacturing the same is provided. The MEMS package assembly includes a substrate, a housing coupled to the substrate to form a cavity, wherein the housing includes a transparent plate disposed above and parallel to the substrate and is configured to permit a transmission of light therethrough, and a MEMS chip disposed within the cavity and including a first main surface proximal to the transparent plate and a second main surface opposite to the first main surface and coupled to the substrate. The MEMS chip is oriented such that the first main surface is tilted at a tilt angle with respect to the transparent plate.

Abstract: In accordance with an embodiment, a MEMS device includes a first membrane element, a second membrane element spaced apart from the first membrane element, a low pressure region between the first and second membrane elements, the low pressure region having a pressure less than an ambient pressure, and a counter electrode structure comprising a conductive layer, which is at least partially arranged in the low pressure region or extends in the low pressure region. The conductive layer includes a segmentation providing an electrical isolation between a first portion of the conductive layer and a second portion of the conductive layer.

Abstract: A microelectromechanical microphone includes a reference electrode, a first membrane arranged on a first side of the reference electrode and displaceable by sound to be detected, and a second membrane arranged on a second side of the reference electrode, said second side being situated opposite the first side of the reference electrode, and displaceable by sound to be detected. A region of one from the first and second membranes that is displaceable by sound relative to the reference electrode, independently of said region's position relative to the reference electrode, can comprise a planar section and also an undulatory section adjoining the planar section and arranged in a region of overlap one of the first membrane or the second membrane with the other one of the first membrane and or the second membrane.

Abstract: A method for producing an infrared emitter arrangement is provided. The method includes providing a carrier. The carrier includes at least one infrared emitter structure at a first side of the carrier and at least one cutout at a second side of the carrier, said second side being situated opposite the first side of the carrier, wherein the at least one cutout extends from the second side of the carrier in the direction of the at least one infrared emitter structure. The method further includes securing an infrared filter layer structure at the second side of the carrier in such a way that the at least one cutout separates the at least one infrared emitter structure from the infrared filter layer structure.

Abstract: In accordance with an embodiment, a MEMS device includes a first membrane element, a second membrane element spaced apart from the first membrane element, a low pressure region between the first and second membrane elements, the low pressure region having a pressure less than an ambient pressure, and a counter electrode structure comprising a conductive layer, which is at least partially arranged in the low pressure region or extends in the low pressure region. The conductive layer includes a segmentation providing an electrical isolation between a first portion of the conductive layer and a second portion of the conductive layer.

Abstract: In accordance with an embodiment, a MEMS device includes a first membrane element, a second membrane element spaced apart from the first membrane element, a low pressure region between the first and second membrane elements, the low pressure region having a pressure less than an ambient pressure, and a counter electrode structure comprising a conductive layer, which is at least partially arranged in the low pressure region or extends in the low pressure region. The conductive layer includes a segmentation providing an electrical isolation between a first portion of the conductive layer and a second portion of the conductive layer.

Abstract: In accordance with an embodiment, a MEMS device includes a first membrane element, a second membrane element spaced apart from the first membrane element, a low pressure region between the first and second membrane elements, the low pressure region having a pressure less than an ambient pressure, and a counter electrode structure comprising a conductive layer, which is at least partially arranged in the low pressure region or extends in the low pressure region. The conductive layer includes a segmentation providing an electrical isolation between a first portion of the conductive layer and a second portion of the conductive layer.

Abstract: A sensor device which is suitable for receiving and transmitting signals and can be placed on a test person's head, includes a sensor device housing having a signal pin on its distal side for receiving a signal and a connection on its proximal side for the signal transmission of a signal received by the signal pin. A sensor device holder has an axial through opening in which the sensor device housing is disposed so as to be steplessly axially displaceable. When the sensor device housing is axially displaced relative to the sensor device holder, the sensor device housing does not change its radial orientation. A cap having a plurality of sensor devices is also provided.

Abstract: Apparatuses and methods are provided where porous metal is deposited on a substrate, a mask is provided on the porous metal and then an etching is performed.

Abstract: Various methods, apparatuses and devices relate to porous metal layers on a substrate which are three-dimensionally coated. In one embodiment, a porous metal layer is deposited over a substrate. The porous metal layer can be three-dimensionally coated with a coating material.

Abstract: Apparatuses and methods are provided where porous metal is deposited on a substrate, a mask is provided on the porous metal and then an etching is performed.

Abstract: An apparatus (1) for transferring a wall (2) of a transport container (3), particularly of an automotive body or a container, between a closed position and an open position, comprising at least one link (4) which is pivotably mounted about a rotational axis (4?, 4?) on the transport container (3) and on the wall (2) of the transport container (3), and a first drive (5) connected to the link (4) for pivoting the wall (2) from the closed position into the open position and vice versa, wherein a further drive (6) is provided, which is designed to displace the wall (2), at least in a region adjoining a corner region (3?) of the transport container, from the closed position substantially perpendicularly to the extension plane of the wall (2) away from the transport container (3), and vice versa.

Abstract: A metal sheet folding device, particularly a folding press, comprising a table beam stationarily arranged on a machine frame, and a press beam arranged on the machine frame in guide arrangements with a driving device. The press beam is adjustable in relation to the table beam. Furthermore, provision is made for a sheet depositing/positioning device for at least one metal sheet plate or at least one workpiece for intermediately positioning the latter for carrying out a gripping operation with the gripping device of a handling system. The device is supported on the machine frame preferably on the table beam and adjustable in a linear guide arrangement in the direction of the longitudinal expanse of the table beam over at least part of the length.

Abstract: A metal sheet folding device, particularly a folding press, comprising a table beam stationarily arranged on a machine frame, and a press beam arranged on the machine frame in guide arrangements with a driving device. The press beam is adjustable in relation to the table beam. Furthermore, provision is made for a sheet depositing/positioning device for at least one metal sheet plate or at least one workpiece for intermediately positioning the latter for carrying out a gripping operation with the gripping device of a handling system. The device is supported on the machine frame preferably on the table beam and adjustable in a linear guide arrangement in the direction of the longitudinal expanse of the table beam over at least part of the length.

Abstract: The invention relates to a side wall for the body 1, 2, 3 of a vehicle, having at its upper longitudinal edge an upper wall portion 4 pivotably connected to the vehicle body 1, 2, 3 via a first horizontal pivot pin 6, and a lower wall portion 5 which at its upper longitudinal edge is hingeably disposed on the lower longitudinal edge of the upper wall portion 4, while engaging with at least one of the two lateral edges of the upper wall portion 4 is a lifting arm 8 which is articulated via its other end to the upper transverse frame portion 2 of the vehicle body via a third, driven pivot pin 9 parallel with the first pivot pin 6 and the second pivot pin 7.