Patents by Inventor Johannes Adrianus Carolus Cooijmans

Johannes Adrianus Carolus Cooijmans has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Charged particle detector system comprising a conversion electrode
    Patent number: 8952328
    Abstract: The invention relates to a charged particle detector system comprising a conversion plate (110) to convert incoming radiation to secondary electrons. These secondary electrons are then detected by a secondary electron detector (120), thereby providing information of the incoming radiation. Often this information is limited to, in first approximation, the flux of incoming radiation. In the case of, for example, backscattered electrons this is the current of the incoming backscattered electrons. The invention proposes to form the conversion plate as, for example, an energy dependent detector, for example a photodiode to detect electrons, so that the detector system simultaneously provides information of, for example, current (S1) and mean energy (S2) of the incoming radiation. The detector system is especially suited for use in a SEM or a DualBeam apparatus.
    Type: Grant
    Filed: August 3, 2012
    Date of Patent: February 10, 2015
    Assignee: FEI Company
    Inventors: Albertus Aemillius Seyno Sluijterman, Eric Gerardus Theodoor Bosch, Patrick David Vogelsang, Johannes Adrianus Carolus Cooijmans
  • Charged Particle Detector System Comprising a Conversion Electrode
    Publication number: 20130056634
    Abstract: The invention relates to a charged particle detector system comprising a conversion plate (110) to convert incoming radiation to secondary electrons. These secondary electrons are then detected by a secondary electron detector (120), thereby providing information of the incoming radiation. Often this information is limited to, in first approximation, the flux of incoming radiation. In the case of, for example, backscattered electrons this is the current of the incoming backscattered electrons. The invention proposes to form the conversion plate as, for example, an energy dependent detector, for example a photodiode to detect electrons, so that the detector system simultaneously provides information of, for example, current (S1) and mean energy (S2) of the incoming radiation. The detector system is especially suited for use in a SEM or a DualBeam apparatus.
    Type: Application
    Filed: August 3, 2012
    Publication date: March 7, 2013
    Applicant: FEI Company
    Inventors: Albertus Aemillius Seyno Sluijterman, Eric Gerardus Theodoor Bosch, Patrick David Vogelsang, Johannes Adrianus Carolus Cooijmans