Abstract: A method for improved sequencing of light delivery in a lithographic process includes determining a sequence of intensities of light to be delivered that includes an interval within the sequence of intensities where substantially no light is delivered to the substrate and delivering light to a substrate by a light source utilizing a digital mirror device (DMD) according to the sequence of intensities.

Abstract: A method for producing objects by additive manufacturing including the steps of providing an apparatus for producing objects by additive manufacturing, assigning a production job to the apparatus, acquiring, during use of the apparatus to produce one of the objects, information pertaining to an operating condition of the apparatus determinative of an output performance of the apparatus, and controlling, based on the acquired information, at least one of current production of the object and allocation for future production of a further object. In embodiments, the acquired information pertains to at least one of a calibration status of the apparatus, a time to service of the apparatus, a time remaining to complete the current production of the object, and a quality measure.

Abstract: An improved particle beam inspection apparatus, and more particularly, a particle beam inspection apparatus including an improved load lock unit is disclosed. An improved load lock system may comprise a plurality of supporting structures configured to support a wafer and a conditioning plate including a heat transfer element configured to adjust a temperature of the wafer. The load lock system may further comprise a gas vent configured to provide a gas between the conditioning plate and the wafer and a controller configured to assist with the control of the heat transfer element.

Abstract: Disclosed is the use of glycol ether aryl ester plasticizers as viscosity reducing agents in plastisols comprising di(2-ethylhexyl) terephthalate, 1,2-cyclohexane dicarboxylic acid diisononyl ester, or diisononyl phthalate as the primary plasticizer. The glycol ether aryl ester plasticizers improve viscosity and viscosity stability while maintaining or improving plastisol properties such as Shore A Hardness and fusion time.

Abstract: An apparatus for medical imaging of a patient, including an object of interest, is provided. The apparatus comprises a patient support unit, a processor, and a display. The patient support unit is configured to receive a patient. The processor is configured to receive scout images of the patient acquired in respective positions of the apparatus. Each respective position is represented by a position parameter. The processor is further configured to select at least one iso-centering image from the scout images by geometrical calculation using the position parameter of each scout image and a position parameter representing a present position of the apparatus. The processor is further configured to adapt the appearance of the at least one iso-centering image according to the present position of the apparatus. The display is configured to present the at least one adapted iso-centering image.

Abstract: An apparatus displays (20) first data on at least one display unit. A user interaction portion of a user input area of at least one input unit is determined (30); and on the at least one display unit a portion of the first data is displayed (40) simultaneously with second image data. The second image data is representative of the user interaction portion of the user input area of the at least one input unit.

Abstract: An apparatus displays (20) first data on at least one display unit. A user interaction portion of a user input area of at least one input unit is determined (30); and on the at least one display unit a portion of the first data is displayed (40) simultaneously with second image data. The second image data is representative of the user interaction portion of the user input area of the at least one input unit.

Abstract: Disclosed is a system for, or method of, packaging a product within a packaging bag, wherein the packaging bag includes an inner liner and an outer liner. The method including the steps of marking the inner liner with a first marking unit, filling the bag with the product, and subsequently marking the outer liner with a second marking unit. The markings may be machine readable and/or randomly generated and stored in a database. The system may further include a machine reader, which is capable of accessing the database, and which is capable of reading the markings on the inner liner and/or the outer liner, to thus determine if an outer liner subsequently removed from an inner liner is/was the same outer liner associated with the same inner liner, at the time when the bag was filled and/or packaged.

Abstract: A porous member is used in a liquid removal system of an immersion lithographic projection apparatus to smooth uneven flows. A pressure differential across the porous member may be maintained at below the bubble point of the porous member so that a single-phase liquid flow is obtained. Alternatively, the porous member may be used to reduce unevenness in a two-phase flow.

Abstract: A substrate table of an immersion lithographic apparatus is disclosed which comprises a barrier configured to collect liquid. The barrier surrounds the substrate and is spaced apart from the substrate. In this way any liquid which is spilt from the liquid supply system can be collected to reduce the risk of contamination of delicate components of the lithographic projection apparatus.

Abstract: The present invention relates to iso-centering an object of interest prior to computer tomography (CT) scanning for examination of a patient in a C-arm CT examination apparatus. In order to provide facilitated positioning and to overcome or at least minimize these drawbacks, a C-arm CT examination apparatus (10) for CT scanning for examination of a patient is provided. The apparatus comprises a patient support unit, an acquisition unit, a data processing and control unit, and a display unit. The patient support unit is configured to bed a patient, free of motion, on the patient support. The acquisition unit is configured to acquire scout images of the patient including the object of interest in a respective position of the apparatus having position parameters.

Abstract: A porous member is used in a liquid removal system of an immersion lithographic projection apparatus to smooth uneven flows. A pressure differential across the porous member may be maintained at below the bubble point of the porous member so that a single-phase liquid flow is obtained. Alternatively, the porous member may be used to reduce unevenness in a two-phase flow.

Abstract: A porous member is used in a liquid removal system of an immersion lithographic projection apparatus to smooth uneven flows. A pressure differential across the porous member may be maintained at below the bubble point of the porous member so that a single-phase liquid flow is obtained. Alternatively, the porous member may be used to reduce unevenness in a two-phase flow.

Abstract: A substrate table of an immersion lithographic apparatus is disclosed which comprises a barrier configured to collect liquid. The barrier surrounds the substrate and is spaced apart from the substrate. In this way any liquid which is spilt from the liquid supply system can be collected to reduce the risk of contamination of delicate components of the lithographic projection apparatus.

Abstract: A porous member is used in a liquid removal system of an immersion lithographic projection apparatus to smooth uneven flows. A pressure differential across the porous member may be maintained at below the bubble point of the porous member so that a single-phase liquid flow is obtained. Alternatively, the porous member may be used to reduce unevenness in a two-phase flow.

Abstract: A lithographic apparatus is disclosed including a liquid supply system configured to at least partly fill a space between the projection system and the substrate with a liquid, an outlet configured to remove a mixture of liquid and gas passing through a gap between a liquid confinement structure of the liquid supply system and the substrate, and an evacuation system configured to draw the mixture through the outlet, the evacuation system having a separator tank arranged to separate liquid from gas in the mixture and a separator tank pressure controller, connected to a non-liquid-filled region of the separator tank, configured to maintain a stable pressure within the non-liquid-filled region.

Abstract: A substrate table of an immersion lithographic apparatus is disclosed which comprises a barrier configured to collect liquid. The barrier surrounds the substrate and is spaced apart from the substrate. In this way any liquid which is spilt from the liquid supply system can be collected to reduce the risk of contamination of delicate components of the lithographic projection apparatus.

Abstract: Disclosed is a system for, or method of, packaging a product within a packaging bag, wherein the packaging bag includes an inner liner and an outer liner. The method including the steps of marking the inner liner with a first marking unit, filling the bag with the product, and subsequently marking the outer liner with a second marking unit. The markings may be machine readable and/or randomly generated and stored in a database. The system may further include a machine reader, which is capable of accessing the database, and which is capable of reading the markings on the inner liner and/or the outer liner, to thus determine if an outer liner subsequently removed from an inner liner is/was the same outer liner associated with the same inner liner, at the time when the bag was filled and/or packaged.

Abstract: The present invention relates to an apparatus for displaying data. It is described to display (20) first data on at least one display unit. A user interaction portion of a user input area of at least one input unit is determined (30); and on the at least one display unit a portion of the first data is displayed (40) simultaneously with second image data, wherein the second image data is representative of the user interaction portion of the user input area of the at least one input unit.

Abstract: A substrate table of an immersion lithographic apparatus is disclosed which comprises a barrier configured to collect liquid. The barrier surrounds the substrate and is spaced apart from the substrate. In this way any liquid which is spilt from the liquid supply system can be collected to reduce the risk of contamination of delicate components of the lithographic projection apparatus.