Patents by Inventor Johannes Paulus Van Den Heuvel

Johannes Paulus Van Den Heuvel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and method
    Publication number: 20070146679
    Abstract: According to an aspect of the present invention, there is provided a lithographic apparatus that includes a substrate carrier arranged to hold a substrate in position using an electrostatic force. The substrate carrier is provided with an integral power source. The apparatus also includes a substrate table for holding the substrate carrier.
    Type: Application
    Filed: December 28, 2005
    Publication date: June 28, 2007
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Budiman Sutedja, Rudy Pellens, Johannes Paulus Van Den Heuvel, Paulus Leonardus Van Dijk