Patents by Inventor Johannes Ven Es

Johannes Ven Es has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • HEAT PIPE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
    Publication number: 20110075118
    Abstract: A lithographic apparatus is provided that includes a substrate holder configured to hold a substrate, and a heat pipe to maintain the substrate holder at a substantially uniform temperature. The heat pipe has a chamber containing a liquid reservoir and a vapor space, and a heating element at least partly in contact with liquid in the chamber.
    Type: Application
    Filed: September 27, 2010
    Publication date: March 31, 2011
    Applicant: ASML Netherlands B.V.
    Inventors: Johannes Henricus Wilhelmus JACOBS, Nicolaas Ten Kate, Joost Jeroen Ottens, Gerrit Van Donk, Johannes Ven Es