Patents by Inventor John A. Weems

John A. Weems has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for detecting a location of contaminant entry in a processing fluid production and distribution system
    Patent number: 6037182
    Abstract: A method is used to detect a location of contaminant entry in a processing fluid production and distribution system. A wafer is placed in a clean container. The clean container is connected to a test point within the processing fluid production and distribution system. Processing fluid from the test point of the processing fluid production and distribution system is allowed to flow through the clean container. The wafer is dried. The wafer is then tested for the existence of contaminants.
    Type: Grant
    Filed: December 29, 1997
    Date of Patent: March 14, 2000
    Assignee: VLSI Technology, Inc.
    Inventor: John A. Weems