Abstract: Disclosed herein are methods, apparatuses, and techniques for estimating the state of a system. According to one implementation, a Massively Parallel Nested Factorization technique, or MPNF, is disclosed that runs efficiently on parallel computer architectures. Also disclosed is a procedure used to create and utilize MPNF ordering.

Abstract: This invention relates to a method of processing substrates including: (a) etching, in a chamber, a generally vertical structure in a substrate using a cyclic process including an etch step using a reactive etch gas and a deposition step for depositing a protective polymer on to the side walls of that part of the structure which has already been etched by a preceding etch step or steps; and (b) cleaning, in the absence of any substrate, the chamber of material deposited thereon by the performance of the deposition step in step (a) characterized in that following the cleaning of the deposition derived material, the chamber is cleaned of material derived from the etchant gas by exposing the chamber to a plasma containing a mixture of O2 and at least the active element of elements of the etchant gas.

Abstract: A computer-implemented method of estimating the physical state of a fluid reservoir with known physical characteristics and subject to specified boundary conditions is provided. The fluid reservoir is represented as a plurality of nodes arranged in N-dimensional space, where N>1, each node representing a discrete finite volume of the fluid reservoir and being associated with a set of physical properties, the physical properties associated with the nodes together forming a vector x when arranged in order, with the vector x representing the physical state of the fluid reservoir, and where the discrete finite volumes together represent the entire fluid reservoir. The method includes for each of a plurality of iterations, estimating a change dx in the vector x that results in all relations being simultaneously satisfied, and at the end of each iteration updating the current value of x according to x=x+dx.

Abstract: Disclosed herein are methods, apparatuses, and techniques for estimating the state of a system. According to one implementation, a Massively Parallel Nested Factorisation technique, or MPNF, is disclosed that runs efficiently on parallel computer architectures. Also disclosed is a procedure used to create and utilize MPNF ordering.

Abstract: A computer-implemented method is provided of estimating the physical state of a physical system with known physical characteristics and subject to specified boundary conditions. The system is represented as a plurality of nodes arranged in N-dimensional space, where N is an integer greater than 1, each node being associated with a set of physical properties, the physical properties associated with the nodes together forming a vector x when arranged in order, such that the vector x represents the physical state of the system. Physical data is received relating to the boundary conditions and the physical characteristics of the system, and it is determined from the received data the relations which must be satisfied by the component elements of the vector x, the number of relations being sufficient to determine the value of all elements of x. An initial estimate x0 is received or determined for the physical properties which will satisfy the relations.

Abstract: This invention relates to a method of processing substrates including: (a) etching, in a chamber, a generally vertical structure in a substrate using a cyclic process including an etch step using a reactive etch gas and a deposition step for depositing a protective polymer on to the side walls of that part of the structure which has already been etched by a preceding etch step or steps; and (b) cleaning, in the absence of any substrate, the chamber of material deposited thereon by the performance of the deposition step in step (a) characterised in that following the cleaning of the deposition derived material, the chamber is cleaned of material derived from the etchant gas by exposing the chamber to a plasma containing a mixture of O2 and at least the active element of elements of the etchant gas.

Abstract: This invention relates to plasma processing apparatus and in particular, but not exclusively, to inductively coupled plasma helicon or electron cyclotron resonance apparatus. A plasma generation chamber is sat above a process chamber, in which is located a workpiece support. A plasma generation or source region exists and coils are provided to create magnetic mirrors above and below the plasma generation zone, whereby electrons will be reflected back towards the plasma zone and there is no electrical conductive path extending around or through at least the upper mirror.

Abstract: This invention relates to plasma processing apparatus and in particular, but not exclusively, to inductively coupled plasma helicon or electron cyclotron resonance apparatus.

Abstract: Disclosed is a method and apparatus for orientation blow molding and heat setting of a thermally crystallizable polymer wherein the orientation blow molding is effected in a relatively low mass blow mold which is enclosed within a heated, high mass mold for transferring heat to the hollow article for heat setting; thereafter the outer mold is opened and the blow mold is cooled in a variety of methods in order to cool the heat set hollow article.