Abstract: Clean corona gas ionization by separating contaminant byproducts from corona generated ions includes establishing a non-ionized gas stream having a pressure and flowing in a downstream direction, establishing a plasma region of ions and contaminant byproducts in which the pressure is sufficiently lower than the pressure of the non-ionized gas stream to prevent at least a substantial portion of the byproducts from migrating into the non-ionized gas stream, and applying an electric field to the plasma region sufficient to induce at least a substantial portion of the ions to migrate into the non-ionized gas stream.

Abstract: Clean corona gas ionization by separating contaminant byproducts from corona generated ions includes establishing a non-ionized gas stream having a pressure and flowing in a downstream direction, establishing a plasma region of ions and contaminant byproducts in which the pressure is sufficiently lower than the pressure of the non-ionized gas stream to prevent at least a substantial portion of the byproducts from migrating into the non-ionized gas stream, and applying an electric field to the plasma region sufficient to induce at least a substantial portion of the ions to migrate into the non-ionized gas stream.

Abstract: Clean corona gas ionization by separating contaminant byproducts from corona generated ions includes establishing a non-ionized gas stream having a pressure and flowing in a downstream direction, establishing a plasma region of ions and contaminant byproducts in which the pressure is sufficiently lower than the pressure of the non-ionized gas stream to prevent at least a substantial portion of the byproducts from migrating into the non-ionized gas stream, and applying an electric field to the plasma region sufficient to induce at least a substantial portion of the ions to migrate into the non-ionized gas stream.

Abstract: Clean corona gas ionization by separating contaminant byproducts from corona generated ions includes establishing a non-ionized gas stream having a pressure and flowing in a downstream direction, establishing a plasma region of ions and contaminant byproducts in which the pressure is sufficiently lower than the pressure of the non-ionized gas stream to prevent at least a substantial portion of the byproducts from migrating into the non-ionized gas stream, and applying an electric field to the plasma region sufficient to induce at least a substantial portion of the ions to migrate into the non-ionized gas stream.

Abstract: Clean corona gas ionization by separating contaminant byproducts from corona generated ions includes establishing a non-ionized gas stream having a pressure and flowing in a downstream direction, establishing a plasma region of ions and contaminant byproducts in which the pressure is sufficiently lower than the pressure of the non-ionized gas stream to prevent at least a substantial portion of the byproducts from migrating into the non-ionized gas stream, and applying an electric field to the plasma region sufficient to induce at least a substantial portion of the ions to migrate into the non-ionized gas stream.

Abstract: Ion delivery manifolds with a gas transport channel, for receiving an ionized gas stream, and plural outlets that divide the gas stream into plural neutralization gas streams that are directed toward respective plural target regions are disclosed. At least generally equal ion distribution across the target regions is achieved by using different ion flow rates through the plural outlets. Methods of delivering plural neutralization streams to respective plural target regions include steps for receiving an ionized gas stream, for dividing the ionized gas stream into plural neutralization streams, and for directing the neutralization streams toward respective target regions. At least generally equal ion distribution across the target regions is achieved by differing the ion flow rates of the neutralization streams.

Abstract: Clean corona gas ionization by separating contaminant byproducts from corona generated ions includes establishing a non-ionized gas stream having a pressure and flowing in a downstream direction, establishing a plasma region of ions and contaminant byproducts in which the pressure is sufficiently lower than the pressure of the non-ionized gas stream to prevent at least a substantial portion of the byproducts from migrating into the non-ionized gas stream, and applying an electric field to the plasma region sufficient to induce at least a substantial portion of the ions to migrate into the non-ionized gas stream.

Abstract: A hydrogen generating vessel wherein a reduction plate generates hydrogen by electrolysis of sea water. The hydrogen generating vessel operates at deep ocean levels to provide unexpected advantages. The operating depth is not limited because the hydrogen generating vessel includes openings at or near the bottom, and no pressure differential exists across the vessel walls. Pressure inside and outside are the same, and are determined by the depth at which the hydrogen generating vessel is installed. Electrolysis, collection, and temporary storage take place in the same container. Since the hydrogen pressure is the same as the water pressure at the same depth, the hydrogen is pumped by simply opening a release valve. Operation within recommended guidelines provides a self-cleaning mechanism.

Abstract: A hydrogen generation vessel within which a reduction plate generates hydrogen by electrolysis of sea water. The hydrogen generation vessel operates at deep ocean levels to provide unexpected advantages. The operating depth is not limited because the hydrogen generation vessel includes openings at or near the bottom, and no pressure differential exists across the vessel walls. Pressure inside and outside are the same, and are determined by the depth at which the hydrogen generation vessel is positioned. Electrolysis, collection, and storage (temporary) take place in the same container. Since the hydrogen pressure is the same as the water pressure at the same depth, the hydrogen is pumped by simply opening a valve.

Abstract: Apparatus and method and system for measuring and controlling electrostatic charge on objects such as semiconductor substrates include a cassette having an inner structure with supporting slots and electrically conductive regions, and having isolated conductive outer walls for supporting objects in the slots, and include a charge monitor connected to the conductive regions and the conductive walls for sensing charge applicable to one or more objects carrying static charge positioned within the cassette. Charge neutralization is controlled in response to sensed charge attaining a selected level.

Abstract: Ionizing apparatus includes a housing that supports a plurality of ionizing electrodes disposed within fluid apertures that are connected via tubing conduits to pass fluid therethrough about the electrodes. Gas to be ionized is supplied under pressure to the apertures transporting gas ions generated at the electrodes in response to high ionizing voltage supplied thereto. To clean the ionizing apparatus, cleaning liquid is supplied under pressure in one flow direction through the tubing conduits and apertures to remove particles from within the tubing conduits and apertures and from surfaces of the electrodes.

Abstract: Ionizing apparatus includes a housing that supports a plurality of ionizing electrodes disposed within fluid apertures that are connected via tubing conduits to pass fluid therethrough about the electrodes. Gas to be ionized supplied under pressure to the apertures transports gas ions generated at the electrodes in response to high ionizing voltage supplied thereto. To clean the ionizing apparatus, cleaning liquid is supplied under pressure in one flow direction through the tubing conduits and apertures to remove particles from within the tubing conduits and apertures and from surfaces of the electrodes.