Abstract: A method for drying and removing contaminants from a low-k dielectric film of an integrated circuit wafer, the method comprising exposing the low k dielectric layer to photons; and simultaneously with, prior to, or subsequent to the photon exposure, exposing the substrate to a process effective to remove the contaminants without causing degradation of the low k dielectric layer, wherein the process is selected from the group consisting of a heat process, a vacuum process, an oxygen free plasma process, and combinations thereof.

Abstract: A method of enabling the removal of fluorine containing residue from a semiconductor substrate comprising applying a gas and/or vapor to which the residue is reactive to the residue while the temperature of the substrate is at an elevated level with respect to ambient temperature and the residue is exposed to ultraviolet radiation, for a time period which is sufficient to effect at least one of volatilizing the residue or rendering the residue hydrophilic enough to be removable with deionized water.

Abstract: Mortar cement additives provide workability while retaining strength by employing a multi-stage polymer comprising a hydrophobically-modified, ionically-soluble polymer stage, the polymer being soluble at a pH of 6 and above; and an air-entraining agent. The additives also employ, as optional ingredients, set retarding agents and superplasticizers. Examplary methods of the invention involve addition of the multi-stage polymer and an air entraining agent to the mortar cement, preferably during intergrinding of Portland cement in the mill. Cement compositions comprising the polymer and an air-entraining agent are also disclosed.

Abstract: Mortar cement additives provide workability while retaining strength by employing a multi-stage polymer comprising a hydrophobically-modified, ionically-soluble polymer stage, the polymer being soluble at a pH of 6 and above; and an air-entraining agent. The additives also employ, as optional ingredients, set retarding agents and superplasticizers. Examplary methods of the invention involve addition of the multi-stage polymer and an air entraining agent to the mortar cement, preferably during intergrinding of Portland cement in the mill. Cement compositions comprising the polymer and an air-entraining agent are also disclosed.