Abstract: A refrigerant management system controls the supply of refrigerant from two or more variable speed and fixed speed compressors to a plurality of cryogenic refrigerators. The system employs a plurality of sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators. The amount of refrigerant to supply is based on an aggregate demand for refrigerant from the plurality of cryogenic refrigerators and a refrigerant correction metric. An appropriate supply of refrigerant is distributed to each cryogenic refrigerator by adjusting the speed of the variable speed compressors or, alternatively, selectively turning the compressors on or off. The speed of the variable speed compressors is adjusted by determining an amount of refrigerant to supply to the plurality of cryogenic refrigerators.

Abstract: A refrigerant management system controls the supply of refrigerant from two or more variable speed and fixed speed compressors to a plurality of cryogenic refrigerators. The system employs a plurality of sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators. The amount of refrigerant to supply is based on an aggregate demand for refrigerant from the plurality of cryogenic refrigerators and a refrigerant correction metric. An appropriate supply of refrigerant is distributed to each cryogenic refrigerator by adjusting the speed of the variable speed compressors or, alternatively, selectively turning the compressors on or off. The speed of the variable speed compressors is adjusted by determining an amount of refrigerant to supply to the plurality of cryogenic refrigerators.

Abstract: A refrigerant management system controls the supply of refrigerant from two or more variable speed and fixed speed compressors to a plurality of cryogenic refrigerators. The system employs a plurality of sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators. The amount of refrigerant to supply is based on an aggregate demand for refrigerant from the plurality of cryogenic refrigerators and a refrigerant correction metric. An appropriate supply of refrigerant is distributed to each cryogenic refrigerator by adjusting the speed of the variable speed compressors or, alternatively, selectively turning the compressors on or off. The speed of the variable speed compressors is adjusted by determining an amount of refrigerant to supply to the plurality of cryogenic refrigerators.

Abstract: A vacuum network control system includes a plurality of nodes configured for control over operational processes of the system. The plural nodes are configured, in a network ring or other topology, as a selectable master node for controlling the operational processes. Control can be distributed among, and passed between, each of the nodes. Each node on the network monitors adjacent network connectors to detect a fault in the network. In response to a detected fault, a disconnect is mapped to the fault, and the network topology is reconfigured for continued communication among the nodes and with external devices.

Abstract: A refrigerant management system controls the supply of refrigerant from two or more variable speed and fixed speed compressors to a plurality of cryogenic refrigerators. The system employs a plurality of sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators. The amount of refrigerant to supply is based on an aggregate demand for refrigerant from the plurality of cryogenic refrigerators and a refrigerant correction metric. An appropriate supply of refrigerant is distributed to each cryogenic refrigerator by adjusting the speed of the variable speed compressors or, alternatively, selectively turning the compressors on or off. The speed of the variable speed compressors is adjusted by determining an amount of refrigerant to supply to the plurality of cryogenic refrigerators.

Abstract: A vacuum network control system includes a plurality of nodes configured for control over operational processes of the system. The plural nodes are configured, in a network ring or other topology, as a selectable master node for controlling the operational processes. Control can be distributed among, and passed between, each of the nodes. Each node on the network monitors adjacent network connectors to detect a fault in the network. In response to a detected fault, a disconnect is mapped to the fault, and the network topology is reconfigured for continued communication among the nodes and with external devices.

Abstract: A portable display unit includes a serial port to connect to a device such as a vacuum network controller, cryopump, turbomolecular pump, gauges or compressor. In particular, the display unit can be plugged and unplugged to devices of different types. The portable display unit includes a display and control keys for programming, controlling and monitoring the functions of a device. The device accessible to the display unit includes a display interface having software code and files to interface with the display unit. Accordingly, the portable display unit can be used with any device having software code to interface with the display unit. The software code generates, refreshes and communicates menus to the portable display unit to provide graphical interface of the device's functions. The portable display unit further includes inner and outer hand grips so that the display unit can be held by hands of different sizes.

Abstract: A securing mechanism includes a connector latch and a module latch such that engagement of the connector latch with a connector causes the module latch to engage a housing support. The securing mechanism prevents removal of a module from a housing support when a connector, such as on a power cable, is engaged by the connector latch. The connector latch has a position adjustment mechanism, engageable by an external tool, that controls the position of the connector latch. A tool is used to position the connector latch and allow the insertion or removal of the connector.

Abstract: A vacuum network control system includes a vacuum network controller hub communicating over a public high-speed network, where the hub has an address registered with respect to the non-local network and communicates over a first local high-speed network. Vacuum network controllers (VNCs) communicate with the hub over the first local network. Each VNC has a dynamically assigned local address and communicates with at least one component intrabus module over a second local high-speed network. Each module has a dynamically assigned local address and further communicates with one or more monitor and control end units over a local device network. Each monitor and control end unit has a dynamically assigned address. Monitor and control end units include taps, which provide at least one of analog, digital or serial I/O, and components, for example, vacuum pumps.

Abstract: A portable display unit includes a serial port to connect to a device such as a vacuum network controller, cryopump, turbomolecular pump, gauges or compressor. In particular, the display unit can be plugged and unplugged to devices of different types. The portable display unit includes a display and control keys for programming, controlling and monitoring the functions of a device. The device accessible to the display unit includes a display interface having software code and files to interface with the display unit. Accordingly, the portable display unit can be used with any device having software code to interface with the display unit. The software code generates, refreshes and communicates menus to the portable display unit to provide graphical interface of the device's functions. The portable display unit further includes inner and outer hand grips so that the display unit can be held by hands of different sizes.

Abstract: A cryopump system includes an integral assembly having a refrigerator, cryopumping surfaces cooled by the refrigerator, a first electronic module for controlling the cryopump, and a second electronic module which is removably coupled to the first module. The second electronic module has a first surface abutting a complementary first surface of a housing of the first electronic module. Preferably, the first controller module has three orthogonal surfaces of approximately the same dimensions. Electronic modules can be removably coupled to each of the three surfaces. The cryopump system includes a module cap which is coupled to an end of an electronic module to shield electrical connections between two coupled electronic modules. The electronic modules comprise a channel of rectangular cross section having slots for mounting printed circuit boards.

Abstract: A vacuum network control system includes a vacuum network controller hub communicating over a public high-speed network, where the hub has an address registered with respect to the non-local network and communicates over a first local high-speed network. Vacuum network controllers (VNCs) communicate with the hub over the first local network. Each VNC has a dynamically assigned local address and communicates with at least one component intrabus module over a second local high-speed network. Each module has a dynamically assigned local address and further communicates with one or more monitor and control end units over a local device network. Each monitor and control end unit has a dynamically assigned address. Monitor and control end units include taps, which provide at least one of analog, digital or serial I/O, and components, for example, vacuum pumps.

Abstract: A securing mechanism includes a connector latch and a module latch such that engagement of the connector latch with a connector causes the module latch to engage a housing support. The securing mechanism prevents removal of a module from a housing support when a connector, such as on a power cable, is engaged by the connector latch. The connector latch has a position adjustment mechanism, engageable by an external tool, that controls the position of the connector latch. A tool is used to position the connector latch and allow the insertion or removal of the connector.

Abstract: A cryopump system includes an integral assembly having a refrigerator, cryopumping surfaces cooled by the refrigerator, a first electronic module for controlling the cryopump, and a second electronic module which is removably coupled to the first module. The second electronic module has a first surface abutting a complementary first surface of a housing of the first electronic module. Preferably, the first controller module has three orthogonal surfaces of approximately the same dimensions. Electronic modules can be removably coupled to each of the three surfaces.

Abstract: A cryopump system includes an integral assembly having a refrigerator, cryopumping surfaces cooled by the refrigerator, a first electronic module for controlling the cryopump, and a second electronic module which is removably coupled to the first module. The second electronic module has a first surface abutting a complementary first surface of a housing of the first electronic module. Preferably, the first controller module has three orthogonal surfaces of approximately the same dimensions. Electronic modules can be removably coupled to each of the three surfaces. The cryopump system includes a module cap which is coupled to an end of an electronic module to shield electrical connections between two coupled electronic modules. The electronic modules comprise a channel of rectangular cross section having slots for mounting printed circuit boards.