Patents by Inventor John Les Hughes

John Les Hughes has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate processing system
    Patent number: 6517691
    Abstract: A substrate processing system includes a primary processing assembly and secondary processing assembly. The secondary processing assembly has one or more interconnected modules and includes one or more process stations. The primary and secondary processing assemblies are connected by a vacuum conveyor, so that the substrates remain in vacuum during transport. The secondary processing assembly may include one or more modules which are interconnected to provide a desired system configuration. A dual processing module, including first and second process stations, is selectably operable in a serial mode or a parallel mode.
    Type: Grant
    Filed: May 1, 2000
    Date of Patent: February 11, 2003
    Assignee: Intevac, Inc.
    Inventors: Terry Bluck, John Les Hughes, Eric C. Lawson, Tatsuru Tanaka