Abstract: An anode apparatus for mounting on an external surface of a concrete structure to provide cathodic protection of metal members in the concrete uses a pre-assembled body which is typically elongate carrying a longitudinal anode, which can be sacrificial or impressed current, together with a supporting material having a front face for attachment to the surface and an impermeable plastic covering material at the rear face covering the anode and the supporting material when the front face is attached to the surface of the concrete. A channel defined on the front face is arranged to receive a layer of a conformable ionically conductive adhesive material for attachment to the external surface. A distance of the edge of the covering material is arranged to be similar to a distance of the metal from the external surface such that wetting and drying effects of environmental moisture are the same for the anode as for the metal components.

Abstract: The present invention relates to a system and method for sampling a gas flow to measure one or more contaminants within a semiconductor processing tool. The system includes a portable unit containing one or more dry traps, Tenax traps and, if desired, wet impingers. The unit is coupled to a gas flow in a clean room and the dry traps. Tenax traps and wet impingers measure contaminants contained in the gas supply for a determined sampling interval. When the sampling interval is done, the unit is sent to an analysis facility for processing.

Abstract: The present invention relates to a system and method for sampling a gas flow to measure one or more contaminants within a semiconductor processing tool. The system includes a portable unit containing one or more dry traps, Tenax traps and, if desired, wet impingers. The unit is coupled to a gas flow in a clean room and the dry traps. Tenax traps and wet impingers measure contaminants contained in the gas supply for a determined sampling interval. When the sampling interval is done, the unit is sent to an analysis facility for processing.