Abstract: This invention relates to substrate supports, e.g., coated electrostatic chucks, having a dielectric multilayer formed thereon; dielectric multilayers that provide erosive and corrosive barrier protection in harsh environments such as plasma treating vessels used in semiconductor device manufacture; process chambers, e.g., deposition chambers, for processing substrates; methods for protecting substrate supports; and methods for producing substrate supports and electronic devices. The dielectric multilayer comprises (a) an undercoat dielectric layer comprising a metal oxide or metal nitride formed on a surface; and (b) a topcoat dielectric layer comprising a metal oxide formed on the undercoat dielectric layer. The topcoat dielectric layer has an aluminum oxide content of less than about 1 weight percent. The topcoat dielectric layer has a corrosion resistance and/or plasma erosion resistance greater than the corrosion resistance and/or plasma erosion resistance of the undercoat dielectric layer.

Abstract: This invention relates to substrate supports, e.g., coated electrostatic chucks, having a dielectric multilayer formed thereon; dielectric multilayers that provide erosive and corrosive barrier protection in harsh environments such as plasma treating vessels used in semiconductor device manufacture; process chambers, e.g., deposition chambers, for processing substrates; methods for protecting substrate supports; and methods for producing substrate supports and electronic devices. The dielectric multilayer comprises (a) an undercoat dielectric layer comprising a metal oxide or metal nitride formed on a surface; and (b) a topcoat dielectric layer comprising a metal oxide formed on the undercoat dielectric layer. The topcoat dielectric layer has an aluminum oxide content of less than about 1 weight percent. The topcoat dielectric layer has a corrosion resistance and/or plasma erosion resistance greater than the corrosion resistance and/or plasma erosion resistance of the undercoat dielectric layer.

Abstract: This invention relates to thermal spray coatings on a metal or non-metal substrate. The thermal spray coating comprises a partially or fully stabilized ceramic coating, e.g., yttria stabilized zirconia coating, and has sufficiently high thermodynamic phase stability to provide corrosion and/or erosion resistance to the substrate. This invention also relates to methods of protecting metal and non-metal substrates by applying the thermal spray coatings. The coatings are useful, for example, in the protection of integrated circuit manufacturing equipment, internal chamber components, and electrostatic chuck manufacture.

Abstract: A method of heating a fluid utilizing a process heater having one or more first combustion zones and one or more second combustion zones. The combustion of a fuel is divided between the first and second combustion zones. The oxygen is provided for combustion within the first combustion zone by one or more oxygen transport membranes that contribute between about 50 and 99 percent of the stoichiometric amount of oxygen required for complete combustion of the fuel passing through the process heater. A supplemental or secondary oxidant is introduced into second combustion zone to complete combustion of the fuel and thereby produce a flue gas stream containing between about 1 and 3 percent oxygen to ensure complete combustion of the fuel. In this manner, the surface area of the oxygen transport membranes may be reduced below the surface area that otherwise would be required if 100 percent of the oxygen were contributed by the oxygen transport membranes.

Abstract: A method of heating a fluid utilizing a process heater having one or more first combustion zones and one or more second combustion zones. The combustion of a fuel is divided between the first and second combustion zones. The oxygen is provided for combustion within the first combustion zone by one or more oxygen transport membranes that contribute between about 50 and 99 percent of the stoichiometric amount of oxygen required for complete combustion of the fuel passing through the process heater. A supplemental or secondary oxidant is introduced into second combustion zone to complete combustion of the fuel and thereby produce a flue gas stream containing between about 1 and 3 percent oxygen to ensure complete combustion of the fuel. In this manner, the surface area of the oxygen transport membranes may be reduced below the surface area that otherwise would be required if 100 percent of the oxygen were contributed by the oxygen transport membranes.