Patents by Inventor John Szilagyi

John Szilagyi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240138048
    Abstract: An illumination system includes a gas containment vessel configured to contain a gas. The illumination system also includes one or more pump sources configured to generate one or more pump beams. The illumination system includes an ozone generation unit including one or more illumination sources. The one or more illumination sources are configured to generate a beam of illumination of an energy sufficient for converting a portion of diatomic oxygen (O2) contained within the gas containment vessel to triatomic oxygen (O3). One or more energy sources are configured to ignite the plasma within the gas contained within the gas containment vessel via absorption of energy of the one or more energy sources by a portion of the triatomic oxygen, wherein the plasma emits broadband radiation.
    Type: Application
    Filed: December 11, 2023
    Publication date: April 25, 2024
    Inventors: John Szilagyi, Ilya Bezel
  • Publication number: 20240105440
    Abstract: A pulse-assisted LSP broadband light source in flowing high-pressure liquid or supercritical fluid is disclosed. The light source includes a fluid containment structure for containing a high-pressure liquid or supercritical fluid. The light source includes a primary laser pump source and a high-repetition pulse-assisting laser light source. wherein the primary laser pump source is configured to direct a primary pump beam into a plasma-forming region of the fluid. The primary beam and the pulsed-assisting beam are configured to sustain a plasma within the plasma-forming region of the fluid within the fluid containment structure. A light collector element is configured to collect broadband light emitted from the plasma for use in downstream applications.
    Type: Application
    Filed: September 25, 2023
    Publication date: March 28, 2024
    Applicant: KLA Corporation
    Inventors: Ilya Bezel, Oleg Khodykin, John Szilagyi
  • Patent number: 11844172
    Abstract: An illumination system includes a gas containment vessel configured to contain a gas. The illumination system also includes one or more pump sources configured to generate one or more pump beams. The illumination system includes an ozone generation unit including one or more illumination sources. The one or more illumination sources are configured to generate a beam of illumination of an energy sufficient for converting a portion of diatomic oxygen (O2) contained within the gas containment vessel to triatomic oxygen (O3). One or more energy sources are configured to ignite the plasma within the gas contained within the gas containment vessel via absorption of energy of the one or more energy sources by a portion of the triatomic oxygen, wherein the plasma emits broadband radiation.
    Type: Grant
    Filed: October 16, 2019
    Date of Patent: December 12, 2023
    Assignee: KLA Corporation
    Inventors: John Szilagyi, Ilya Bezel
  • Publication number: 20230335389
    Abstract: A laser-sustained broadband light source includes a gas containment structure and multiple jet nozzles. The jet nozzles are configured to direct multiple liquid jets of plasma-forming material in directions to collide with one another within the gas containment structure. The laser-sustained broadband light source further includes a laser pump source configured to generate an optical pump to sustain a plasma in a region of the gas containment structure at a collision point of the plurality of liquid jets and a light collector element configured to collect broadband light emitted from the plasma.
    Type: Application
    Filed: April 7, 2023
    Publication date: October 19, 2023
    Inventors: John Szilagyi, Ilya Bezel
  • Publication number: 20210120659
    Abstract: An illumination system includes a gas containment vessel configured to contain a gas. The illumination system also includes one or more pump sources configured to generate one or more pump beams. The illumination system includes an ozone generation unit including one or more illumination sources. The one or more illumination sources are configured to generate a beam of illumination of an energy sufficient for converting a portion of diatomic oxygen (O2) contained within the gas containment vessel to triatomic oxygen (O3). One or more energy sources are configured to ignite the plasma within the gas contained within the gas containment vessel via absorption of energy of the one or more energy sources by a portion of the triatomic oxygen, wherein the plasma emits broadband radiation.
    Type: Application
    Filed: October 16, 2019
    Publication date: April 22, 2021
    Inventors: John Szilagyi, Ilya Bezel
  • Patent number: 10690589
    Abstract: A broadband radiation source is disclosed. The system may include a plasma containment vessel configured to receive laser radiation from a pump source to sustain a plasma within gas flowed through the plasma containment vessel. The plasma containment vessel may be further configured to transmit at least a portion of broadband radiation emitted by the plasma. The system may also include a recirculation gas loop fluidically coupled to the plasma containment vessel. The recirculation gas loop may be configured to transport heated gas from an outlet of the plasma containment vessel, and further configured to transport cooled gas to an inlet of the plasma containment vessel.
    Type: Grant
    Filed: July 24, 2018
    Date of Patent: June 23, 2020
    Assignee: KLA-Tencor Corporation
    Inventors: Ilya Bezel, Kenneth P. Gross, John Szilagyi
  • Publication number: 20190033204
    Abstract: A broadband radiation source is disclosed. The system may include a plasma containment vessel configured to receive laser radiation from a pump source to sustain a plasma within gas flowed through the plasma containment vessel. The plasma containment vessel may be further configured to transmit at least a portion of broadband radiation emitted by the plasma. The system may also include a recirculation gas loop fluidically coupled to the plasma containment vessel. The recirculation gas loop may be configured to transport heated gas from an outlet of the plasma containment vessel, and further configured to transport cooled gas to an inlet of the plasma containment vessel.
    Type: Application
    Filed: July 24, 2018
    Publication date: January 31, 2019
    Inventors: Ilya Bezel, Kenneth P. Gross, John Szilagyi