Patents by Inventor John W. Lam

John W. Lam has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9704717
    Abstract: An electrochemical process for applying a conductive film onto a substrate having a seed layer includes placing the substrate into contact with an electrochemical plating bath containing cobalt or nickel, with the plating bath having pH of 4.0 to 9.0. Electric current is conducted through the bath to the substrate. The cobalt or nickel ions in the bath deposit onto the seed layer. The plating bath may contain cobalt chloride and glycine. The electric current may range from 1-50 milli-ampere per square cm. After completion of the electrochemical process, the substrate may be removed from the plating bath, rinsed and dried, and then annealed at a temperature of 200 to 400 C to improve the material properties and reduce seam line defects. The plating and anneal process may be performed through multiple cycles.
    Type: Grant
    Filed: August 13, 2015
    Date of Patent: July 11, 2017
    Assignee: Applied Materials, Inc.
    Inventors: John W. Lam, Ismail Emesh, Roey Shaviv
  • Patent number: 9496145
    Abstract: An electrochemical process for applying a conductive film onto a substrate having a seed layer includes placing the substrate into contact with an electrochemical plating bath containing cobalt or nickel, with the plating bath having pH of 4.0 to 9.0. Electric current is conducted through the bath to the substrate. The cobalt or nickel ions in the bath deposit onto the seed layer. The plating bath may contain cobalt chloride and glycine. The electric current may range from 1-50 milli-ampere per square cm. After completion of the electrochemical process, the substrate may be removed from the plating bath, rinsed and dried, and then annealed at a temperature of 200 to 400 C to improve the material properties and reduce seam line defects. The plating and anneal process may be performed through multiple cycles.
    Type: Grant
    Filed: March 19, 2014
    Date of Patent: November 15, 2016
    Assignee: APPLIED Materials, Inc.
    Inventors: John W. Lam, Ismail Emesh, Roey Shaviv
  • Publication number: 20160309596
    Abstract: A method for depositing metal in a feature on a workpiece includes forming a seed layer in a feature on a workpiece, wherein the seed layer includes a metal selected from the group consisting of cobalt and nickel; electrochemically depositing a first metallization layer on the seed layer, wherein electrochemically depositing the metallization layer includes using a plating electrolyte having a plating metal ion and a pH in the range of 6 to 13; and heat treating the workpiece after deposition of the first metallization layer.
    Type: Application
    Filed: April 15, 2015
    Publication date: October 20, 2016
    Inventors: Roey Shaviv, John W. Lam, Timothy Bochman, Jennifer Meng Chu Tseng
  • Publication number: 20150357195
    Abstract: An electrochemical process for applying a conductive film onto a substrate having a seed layer includes placing the substrate into contact with an electrochemical plating bath containing cobalt or nickel, with the plating bath having pH of 4.0 to 9.0. Electric current is conducted through the bath to the substrate. The cobalt or nickel ions in the bath deposit onto the seed layer. The plating bath may contain cobalt chloride and glycine. The electric current may range from 1-50 milli-ampere per square cm. After completion of the electrochemical process, the substrate may be removed from the plating bath, rinsed and dried, and then annealed at a temperature of 200 to 400 C to improve the material properties and reduce seam line defects. The plating and anneal process may be performed through multiple cycles.
    Type: Application
    Filed: August 13, 2015
    Publication date: December 10, 2015
    Inventors: John W. Lam, Ismail Emesh, Roey Shaviv
  • Publication number: 20150270133
    Abstract: An electrochemical process for applying a conductive film onto a substrate having a seed layer includes placing the substrate into contact with an electrochemical plating bath containing cobalt or nickel, with the plating bath having pH of 4.0 to 9.0. Electric current is conducted through the bath to the substrate. The cobalt or nickel ions in the bath deposit onto the seed layer. The plating bath may contain cobalt chloride and glycine. The electric current may range from 1-50 milli-ampere per square cm. After completion of the electrochemical process, the substrate may be removed from the plating bath, rinsed and dried, and then annealed at a temperature of 200 to 400 C to improve the material properties and reduce seam line defects. The plating and anneal process may be performed through multiple cycles.
    Type: Application
    Filed: March 19, 2014
    Publication date: September 24, 2015
    Inventors: John W. Lam, Ismail Emesh, Roey Shaviv
  • Patent number: 7770285
    Abstract: A magnetic read/write head is produced with an insert layer between the substrate and the magnetic transducer. The insert layer has a lower coefficient of thermal expansion than the substrate, which reduces the temperature pole tip recession (T-PTR) of the head because the insert layer is an intervening layer between the substrate and magnetic transducer. The insert layer is produced by plating, e.g., an Invar layer over the substrate prior to fabricating the magnetic transducer. The Invar layer is annealed and the structure planarized prior to depositing a non-magnetic gap layer followed by the fabrication of the magnetic transducer.
    Type: Grant
    Filed: March 28, 2008
    Date of Patent: August 10, 2010
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Christian R. Bonhote, Malika D. Carter, David A. Dudek, Wen-Chien D. Hsiao, John W. Lam, Vladimir Nikitin
  • Patent number: 7459198
    Abstract: An electroplated film is deposited over a substrate with a plating frame pattern that includes a plating field defined by a plurality of individual features. By dividing the plating field into a plurality of individual features, the delamination force at any location on the plating field is greatly reduced. Thus, a film with a large stress, such as a high moment film, may be plated to a greater thickness than is possible with conventionally plated films.
    Type: Grant
    Filed: May 28, 2004
    Date of Patent: December 2, 2008
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Christian R. Bonhote, Heather K. DeSimone, John W. Lam, Matthew W. Last, Edward Hin Pong Lee, Ian R. McFadyen
  • Publication number: 20080172862
    Abstract: A magnetic read/write head is produced with an insert layer between the substrate and the magnetic transducer. The insert layer has a lower coefficient of thermal expansion than the substrate, which reduces the temperature pole tip recession (T-PTR) of the head because the insert layer is an intervening layer between the substrate and magnetic transducer. The insert layer is produced by plating, e.g., an Invar layer over the substrate prior to fabricating the magnetic transducer. The Invar layer is annealed and the structure planarized prior to depositing a non-magnetic gap layer followed by the fabrication of the magnetic transducer.
    Type: Application
    Filed: March 28, 2008
    Publication date: July 24, 2008
    Inventors: Christian R. Bonhote, Malika D. Carter, David A. Dudek, Wen-Chien D. Hsiao, John W. Lam, Vladimir Nikitin