Patents by Inventor Jonathan D. Grava

Jonathan D. Grava has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for protecting a seed laser in an EUV light source with a Bragg AOM
    Patent number: 8848277
    Abstract: A method and apparatus for protecting the seed laser in a laser produced plasma (LPP) extreme ultraviolet (EUV) light system are disclosed in one embodiment, a Bragg AOM is used as a switch on the beam path from the seed laser to other optical components and ultimately to an irradiation site. Power is applied to the Bragg AOM and pulses from the seed laser are thus deflected onto the desired beam path rather than passing straight through the Bragg AOM. Once the pulses have passed through the Bragg AOM, power to the Bragg AOM ceases, so that any reflections from the irradiation site will pass straight through the Bragg AOM and will not be deflected back to the seed laser. Use of the Bragg AOM rather than components previously used results in lower power consumption and better protection for the seed laser.
    Type: Grant
    Filed: January 9, 2013
    Date of Patent: September 30, 2014
    Assignee: ASML Netherlands B.V.
    Inventors: Richard L. Sandstrom, Jonathan D. Grava
  • System and Method for Protecting a Seed Laser in an EUV Light Source With a Bragg AOM
    Publication number: 20130322482
    Abstract: A method and apparatus for protecting the seed laser in a laser produced plasma (LPP) extreme ultraviolet (EUV) light system are disclosed in one embodiment, a Bragg AOM is used as a switch on the beam path from the seed laser to other optical components and ultimately to an irradiation site. Power is applied to the Bragg AOM and pulses from the seed laser are thus deflected onto the desired beam path rather than passing straight through the Bragg AOM. Once the pulses have passed through the Bragg AOM, power to the Bragg AOM ceases, so that any reflections from the irradiation site will pass straight through the Bragg AOM and will not be deflected back to the seed laser. Use of the Bragg AOM rather than components previously used results in lower power consumption and better protection for the seed laser.
    Type: Application
    Filed: January 9, 2013
    Publication date: December 5, 2013
    Applicant: CYMER, INC.
    Inventors: Richard L. Sandstrom, Jonathan D. Grava