Abstract: A substrate processing apparatus may be utilized, for example, for a horizontally fixed organic material deposition equipment for manufacturing large-area displays. A substrate processing apparatus may include a titanium cooling plate having an upper surface and a lower surface; an electrostatic chuck including a first dielectric layer provided on the lower surface, an electrode layer provided on the first dielectric layer, and a second dielectric layer provided on the first dielectric layer and the electrode layer, and chucking a glass substrate using an electrostatic force; and a yoke plate positioned on the upper surface and chucking a mask using a magnetic force. The titanium cooling plate may further includes a first channel provided from the upper surface, a second channel provided from the first channel, and a titanium cover plate coupled to the first channel. The titanium cooling plate may provide a cooling flow path using the second channel.

Abstract: An infant's swing is disclosed. The swing is driven by an electric power to automatically operate the swing. The frame is A-shaped in a side view, and a pair of oscillation shafts are secured to a pair of securing bars respectively, the securing bars being installed in the peak portions of the frame 12 respectively. A pair of magnet boxes are provided to contain a pair of securing bars and a pair of electromagnets in each of them, and an oscillator is disposed between each pair of the electromagnets. An electric power is supplied alternately to the electromagnets to alternately magnetize them, thereby making the oscillators swing leftward and rightward.