Abstract: There are provided an apparatus and a method for providing a substrate, which can suppress any additional reaction between a developing solution and a photoresist (PR) film and prevent any PR remnants from being generated from such additional reaction. The method includes: supplying an organic developing solution onto a substrate while rotating the substrate at a first revolutions per minute (rpm); substituting the organic developing solution with a nonpolar rinse solution by supplying the nonpolar rinse solution onto the substrate while rotating the substrate at a second rpm, which is lower than the first rpm; continuing to supply the nonpolar rinse solution while rotating the substrate at a third rpm, which is higher than the second rpm; and continuing to supply the nonpolar rinse solution while rotating the substrate at a fourth rpm, which is between the second rpm and the third rpm.

Abstract: The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a chamber having a treating space therein; a supply line having a first open/close valve installed thereon and configured to supply a treating fluid to the treating space; a heater installed on the supply line and configured to heat the treating fluid; an exhaust line having a second open/close valve installed thereon and configured to exhaust the treating space; and, a controller configured to control the first open/close value and the second open/close valve such that the treating fluid heated is supplied to and exhausted from the treating space before a treating process is performed on a substrate in the treating space.

Abstract: An apparatus and method for treating a substrate are provided. The apparatus includes at least one first process chamber configured to supply a developer onto the substrate; at least one second process chamber configured to treat the substrate using a supercritical fluid; a transfer chamber configured to transfer the substrate from the at least one first process chamber to the at least one second process chamber, while the developer supplied in the at least one first process chamber remains on the substrate; and a temperature and humidity control system configured to manage temperature and humidity of the transfer chamber by supplying a first gas of constant temperature and humidity into the transfer chamber.

Abstract: A substrate processing apparatus and a substrate processing method are provided, in which a flow rate of CO2 injected into a supercritical drying vessel is controlled through multi-level pressure control. The substrate processing method includes disposing a substrate coated with a chemical liquid in a process chamber, that includes a space in which the substrate is processed; drying the substrate by using a supercritical fluid; and taking the substrate out of the process chamber when the substrate is dried.

Abstract: The present disclosure relates to a flow resistance generating unit that generates a flow resistance in a pipe to solve a flow imbalance problem due to a bent pipe and stabilizes an internal airflow, and a substrate treating apparatus including the same. The substrate treating apparatus comprises a fluid supply unit for supplying fluid for treating a substrate and including an upper fluid supply module for supplying the fluid to an upper portion of the substrate, a lower fluid supply module for supplying the fluid to a lower portion of the substrate, and a supply pipe connected to at least one of the upper fluid supply module and the lower fluid supply module, and a flow resistance generating unit installed in the supply pipe and for generating a flow resistance with respect to the fluid passing through the supply pipe.

Abstract: The inventive concept provides a method for treating a substrate. The method for treating a substrate comprises: a pressurization step for increasing a pressure of an inner space of a chamber by supplying a treating fluid to the inner space, after taking the substrate into the inner space; a flow step for generating a flow of the treating fluid by combination of supplying and discharging the treating fluid to and from the inner space; and a depressurization step of decreasing the pressure of the inner space by discharging the treating fluid from the inner space, and wherein the pressurization step comprises: a bottom side supply process for increasing the pressure of the inner space by supplying the treating fluid to a backside of the substrate taken into the inner space; and a top side supply process of increasing the pressure of the inner space by supplying the treating fluid to a top side of the substrate taken into the inner space.

Abstract: The present disclosure relates to a substrate processing apparatus and a substrate processing method. The substrate processing apparatus according to the exemplary embodiment of the present disclosure may include: a processing liquid supply tube; a nozzle unit which is supplied with a processing liquid from the processing liquid supply tube and discharges the processing liquid to the substrate; and a light source unit which is provided to irradiate the processing liquid discharged from the nozzle unit with ultraviolet rays. According to the present disclosure, the processing liquid, which is electrified while passing the processing liquid supply tube, is irradiated with ultraviolet rays, such that electricity is eliminated from the electrified processing liquid, and as a result, it is possible to minimize a problem that the substrate is contaminated by peripheral particles or arcing occurs on the substrate.

Abstract: The present disclosure relates to a substrate processing apparatus and a substrate processing method. The substrate processing apparatus according to the exemplary embodiment of the present disclosure may include: a processing liquid supply tube; a nozzle unit which is supplied with a processing liquid from the processing liquid supply tube and discharges the processing liquid to the substrate; and a light source unit which is provided to irradiate the processing liquid discharged from the nozzle unit with ultraviolet rays. According to the present disclosure, the processing liquid, which is electrified while passing the processing liquid supply tube, is irradiated with ultraviolet rays, such that electricity is eliminated from the electrified processing liquid, and as a result, it is possible to minimize a problem that the substrate is contaminated by peripheral particles or arcing occurs on the substrate.

Abstract: A character input apparatus to input a character using a touch and drag method, the character input apparatus including: an interface to display a character on a touched location, if a touch is detected on the interface; a control unit to control the interface to change the displayed character and a location of the displayed character according to a dragging trace, if the touched location is dragged; and an input unit to input the displayed character displayed when the touch is completed. Accordingly, characters may be conveniently input on a narrow screen.

Abstract: A multimedia apparatus and a method for controlling operations thereof are provided. The multimedia apparatus includes an input unit for receiving a selection signal, a sensing unit for sensing disposition of the multimedia apparatus, and a controller for, if the selection signal is input, performing different operations depending on the disposition. Accordingly, various operations of the multimedia apparatus may be controlled by simple manipulation.

Abstract: A content searching method for enabling a user to directly search for desired contents is provided. The content searching method includes displaying a location of a cell including a content being executed in a distribution map, which displays a plurality of cells divided according to a distribution axis, and when a search button is input, redistributing and displaying a location of the cell including the content being executed in a distribution map, which displays a plurality of cells in a changed skin screen depending on a distribution axis having a changed keyword.

Abstract: A character input apparatus to input a character using a touch and drag method, the character input apparatus including: an interface to display a character on a touched location, if a touch is detected on the interface; a control unit to control the interface to change the displayed character and a location of the displayed character according to a dragging trace, if the touched location is dragged; and an input unit to input the displayed character displayed when the touch is completed. Accordingly, characters may be conveniently input on a narrow screen.

Abstract: A character input apparatus to input a character using a touch and drag method, the character input apparatus including: an interface to display a character on a touched location, if a touch is detected on the interface; a control unit to control the interface to change the displayed character and a location of the displayed character according to a dragging trace, if the touched location is dragged; and an input unit to input the displayed character displayed when the touch is completed. Accordingly, characters may be conveniently input on a narrow screen.

Abstract: Content reproducing apparatus and method of a mobile terminal are disclosed. During the reproduction of content, vibration pattern corresponding to content is detect or generated. The vibration pattern is synchronized with an audio signal during the reproduction of content.

Abstract: A system and method for sorting music files based on moods are provided. The system includes a portable terminal for sorting stored music files based on moods, for changing mood information of a corresponding music file in response to a request to change mood of at least one of the music files, and for transmitting the mood change information to a mood analyzing server, and a mood analyzing server for receiving the mood change information, for updating mood judgment information that is standard information for determining mood of a music file based on the received mood change information, and for transmitting the updated mood judgment information to the portable terminal.

Abstract: Provided is a method for controlling a composite attribute of a portable device, including receiving an input signal for controlling a composite attribute, checking an application program activated according to the reception of the input signal, and checking at least one composite attribute defined in the application program, outputting an attribute control matrix interface in which the checked plurality of attributes are arranged based on a given axis of matrix.

Abstract: A mobile device for operating displayed content having a dual touch screen based on a transparent display panel is provided. The mobile device allows a method for operating displayed content in response to a touch event using at least one of front and back faces of the dual touch screen. The mobile device displays the content on the transparent display panel with a predefined brightness. When receiving a touch event through the transparent display panel, the mobile device modifies the brightness of parts or whole of the displayed content in response to the touch event.

Abstract: A multimedia apparatus is provided. The multimedia apparatus extracts a workout prescription including at least one method of exercise based on user information inputted by a user. As a result, the user is able to set and manage his exercise method using the multimedia apparatus.

Abstract: A method for tagging condition information and a multimedia apparatus using the same are provided. The method includes measuring condition information of a user who is enjoying content, and tagging the content with the measured condition information. Accordingly, the user's condition information for each content is checked and the user's condition information is adjusted using the condition information tagged onto the contents.

Abstract: A multimedia apparatus and a method for controlling operations thereof are provided. The multimedia apparatus includes an input unit for receiving a selection signal, a sensing unit for sensing disposition of the multimedia apparatus, and a controller for, if the selection signal is input, performing different operations depending on the disposition. Accordingly, various operations of the multimedia apparatus may be controlled by simple manipulation.