Abstract: An MEMS has a substrate and a cavity arranged in the substrate. A movable element is arranged in the cavity, configured to interact with a fluid arranged in the cavity, wherein a movement of the fluid and a movement of the movable element are causally related. A first opening which connects the cavity to an environment of the substrate causes a first phase offset of a first periodic oscillation which is causally related to the movement of the movable element when passing through the first opening. A second opening which connects the cavity to the environment of the substrate causes a second phase offset, different from the first phase offset, of a second periodic oscillation which is causally related to the movement of the movable element when passing through the second opening.

Abstract: The invention relates to optical arrangements which can be provided, preferably also in miniaturized form, for the most varied applications. They can be used in many sectors of life and also commercially, and indeed whenever information should be presented visually and/or optical information should be recognized and taken into account. It is the object of the invention to provide optical arrangements with which different optical information can be utilized in more complex form together in one arrangement. The optical arrangement in accordance with the invention is configured such that elements both emitting and detecting electromagnetic radiation are arranged on a common substrate or are configured thereat. A plurality of these elements are preferably present together in each case. It can, however, also be sufficient for specific applications to provide in each case an emitting or a detecting element with a plurality of the respective other elements.

Abstract: A reflex coupler has an organic light emitter for generating a light signal and an inorganic photodetector with a detector area. The organic light emitter and the detector area are optically coupled as a result of radiation returned from an object onto which the light signal impinges, and the organic light emitter and the inorganic photodetector are integrated in one device.

Abstract: The invention relates to optical arrangements which can be provided, preferably also in miniaturized form, for the most varied applications. They can be used in many sectors of life and also commercially, and indeed whenever information should be presented visually and/or optical information should be recognized and taken into account. It is the object of the invention to provide optical arrangements with which different optical information can be utilized in more complex form together in one arrangement. The optical arrangement in accordance with the invention is configured such that elements both emitting and detecting electromagnetic radiation are arranged on a common substrate or are configured thereat. A plurality of these elements are preferably present together in each case. It can, however, also be sufficient for specific applications to provide in each case an emitting or a detecting element with a plurality of the respective other elements.

Abstract: The invention relates to an apparatus and a method for the manufacture of light emitting elements comprising organic compounds. These elements are provided with organic light emitting diodes and can be displays or also lighting elements having such light emitting diodes. It is the object of the invention to reduce the effort for the manufacture with respect to the costs and to the time effort. In this connection, already pretreated substrates are further processed in a continuous vacuum coating plant. An electrode is formed on such a substrate and at least one layer of an organic compound which is suitable for the emission of light should be deposited over said electrode. The deposition should take place with different angular distributions. Shadow masks are used for this purpose.

Abstract: A reflex coupler has an organic light emitter for generating a light signal and an inorganic photodetector with a detector area. The organic light emitter and the detector area are optically coupled as a result of radiation returned from an object onto which the light signal impinges, and the organic light emitter and the inorganic photodetector are integrated in one device.

Abstract: A pressure sensor comprises a substrate and a layer defining together with said substrate a pressure sensor cavity, said layer including a diaphragmlike area which is adapted to be acted upon by an external pressure. A micro-miniaturizable pressure sensor of the above-mentioned type, which is used for differential pressure measurement or for relative pressure measurement, is provided on the basis of the features that said cavity is followed by a channel which extends along the surface of said substrate, said channel comprising a layered structure including also the layer which also defines the diaphragmlike area of the pressure sensor, the ratio of the width of the channel to the thickness of the layered structure above the channel being smaller than the ratio of the smallest extension of the diaphragmlike area in the diaphragm plane to the thickness of the diaphragmlike area.