Patents by Inventor Jose V. Tong

Jose V. Tong has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for reduction of voltage potential spike during dechucking
    Patent number: 8628675
    Abstract: Provided is a substrate dechucking system of a plasma processing chamber adapted to remove a substrate from an ESC with reduction in voltage potential spike during dechucking of the substrate.
    Type: Grant
    Filed: October 31, 2012
    Date of Patent: January 14, 2014
    Assignee: Lam Research Corporation
    Inventors: Brian McMillin, Jose V. Tong, Yen-Kun Victor Wang
  • Method and apparatus for reduction of voltage potential spike during dechucking
    Patent number: 8313612
    Abstract: Provided is a substrate dechucking system of a plasma processing chamber adapted to remove a substrate from an ESC with reduction in voltage potential spike during dechucking of the substrate.
    Type: Grant
    Filed: March 24, 2009
    Date of Patent: November 20, 2012
    Assignee: Lam Research Corporation
    Inventors: Brian McMillin, Jose V. Tong, Yen-Kun Victor Wang
  • METHOD AND APPARATUS FOR REDUCTION OF VOLTAGE POTENTIAL SPIKE DURING DECHUCKING
    Publication number: 20100248490
    Abstract: Provided is a substrate dechucking system of a plasma processing chamber adapted to remove a substrate from an ESC with reduction in voltage potential spike during dechucking of the substrate.
    Type: Application
    Filed: March 24, 2009
    Publication date: September 30, 2010
    Applicant: Lam Research Corporation
    Inventors: Brian McMillin, Jose V. Tong, Yen-Kun Victor Wang