Patents by Inventor Joseph Bradley Laird

Joseph Bradley Laird has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus to reduce defects in liquid based PECVD films
    Patent number: 8017527
    Abstract: Apparatuses and methods for diverting a flow of a liquid precursor during flow stabilization and plasma stabilization stages during PECVD processes are effective at eliminating particle defects in PECVD films deposited using a liquid precursor.
    Type: Grant
    Filed: December 16, 2008
    Date of Patent: September 13, 2011
    Assignee: Novellus Systems, Inc.
    Inventors: Arul N. Dhas, Ming Li, Joseph Bradley Laird