Patents by Inventor Joseph J. Farah

Joseph J. Farah has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SEMICONDUCTOR SUBSTRATE SUPPORT LEVELING APPARATUS
    Publication number: 20220108907
    Abstract: Exemplary semiconductor processing systems may include a chamber body including sidewalls and a base. The chamber body may define an interior volume. The systems may include a substrate support extending through the base of the chamber body. The substrate support may be configured to support a substrate within the interior volume. The systems may include a faceplate positioned within the interior volume of the chamber body. The faceplate may define a plurality of apertures through the faceplate. The systems may include a leveling apparatus seated on the substrate support. The leveling apparatus may include a plurality of piezoelectric pressure sensors.
    Type: Application
    Filed: October 5, 2020
    Publication date: April 7, 2022
    Applicant: Applied Materials, Inc.
    Inventors: Katherine Woo, Paul L. Brillhart, Jian Li, Shinnosuke Kawaguchi, David W. Groechel, Dorothea Buechel-Rimmel, Juan Carlos Rocha-Alvarez, Paul E. Fisher, Chidambara A. Ramalingam, Joseph J. Farah