Abstract: In a multicavity klystron amplifier, the drift-tube bore is larger (46) in proportion to the beam size (10) in the non-interacting space between gaps (28) than its size (22) at the gaps (28). This decreases the spacecharge wavelength so that the overall physical length of the klystron is shortened.

Abstract: A partial pressure gauge utilizes an efficient electron collision excitation source yielding de-excitation radiation characteristic of residual gases. The intensity of a given spectral line is proportional to the partial pressure of the gas having such spectral line, and the current drawn from the excitation source provides a measure of the total pressure. A calibration technique based upon comparing the emitted light intensity with the ion currents associated with the excitation process yields an accurate measure of the relative partial pressure. Use of a filter to selectively pass radiation from a known constituent in known proportion in ambient gas provides an indication of the presence of a leak without the need for probing with a test gas. Provision for passing an evaporant stream through the excitation region permits accurate monitoring of the evaporant flux from which deposition rate is determined.

Abstract: A partial pressure gauge utilizes an efficient electron collision excitation source yielding de-excitation radiation characteristic of residual gases. The intensity of a given spectral line is proportional to the partial pressure of the gas having such spectral line, and the current drawn from the excitation source provides a measure of the total pressure. A calibration technique based upon comparing the emitted light intensity with the ion currents associated with the excitation process yields an accurate measure of the relative partial pressure. Use of a filter to selectively pass radiation from a known constituent in known proportion in ambient gas provides an indication of the presence of a leak without the need for probing with a test gas. Provision for passing an evaporant stream through the excitation region permits accurate monitoring of the evaporant flux from which depostion rate is determined.

Abstract: An electron beam evaporator employs an electron gun which projects a beam of electrons over an arcuate beam path to a crucible target for heating and evaporating the target material in use. The electron beam passes through the magnetic field supplied by a pair of pole pieces of a beam focus magnet which produces a main field transverse to the direction of the electrons to cause the beam to take the arcuate trajectory. Two pairs of auxiliary pole pieces project inwardly of the main pole pieces to provide a pair of beam focus lenses. One of the magnetic lenses is disposed on the inside of the beam path, whereas the other is disposed on the outside of the beam path to provide beam lateral focusing and defocusing lenses, respectively. The lenses are adjustable, preferably electromagnetically for controlling the beam spot size on the target crucible so that the evaporation characteristics can be optimized for a given beam power.