Abstract: A method of determining a lateral misregistration between levels of a semiconductor structure comprises imaging at least one first alignment mark in a first level of the structure and at least one second alignment mark in a second level of the structure. A digital image of the first and second alignment marks is formed, each of which are defined by a set of points having an x-value and a y-value. The x-values and y-values of points defining the first alignment mark and points defining the second alignment mark are averaged to determine a center of the first alignment mark and a center of the second alignment mark. An x-coordinate and a y-coordinate of the center of the first alignment mark is subtracted from the respective x-coordinate and y-coordinate of the center of the second alignment mark to determine a lateral misregistration between the first level and the second level.

Abstract: A method of determining a lateral misregistration between levels of a semiconductor structure comprises imaging at least one first alignment mark in a first level of the structure and at least one second alignment mark in a second level of the structure. A digital image of the first and second alignment marks is formed, each of which are defined by a set of points having an x-value and a y-value. The x-values and y-values of points defining the first alignment mark and points defining the second alignment mark are averaged to determine a center of the first alignment mark and a center of the second alignment mark. An x-coordinate and a y-coordinate of the center of the first alignment mark is subtracted from the respective x-coordinate and y-coordinate of the center of the second alignment mark to determine a lateral misregistration between the first level and the second level.

Abstract: A fastener for fastening at least a pair of elongated members to a support structure includes a first arm having a first portion sized to be received within an edge grove or a slot of one elongated member, a second portion disposed substantially perpendicular to the first portion and a third portion disposed at an acute angle to a surface of the support structure prior to use of the fastener, wherein the first portion extends in a first direction from the second portion. There is also a second arm having a portion thereof extending in a second direction being opposite to the first direction, the portion of the second arm is sized to be received within an edge grove or a slot of another elongated member juxtaposed with the one elongated member.