Patents by Inventor Joseph M. Weatherwax, Jr.

Joseph M. Weatherwax, Jr. has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer carrier rinsing mechanism
    Patent number: 6287178
    Abstract: A carrier rinse unit comprising a plurality of nozzles prepositioned to eject a cleaning fluid against a surface of a wafer while the wafer is rotated within a wafer carrier. The prepositioned nozzles may be angled to spray a leading edge, a trailing edge, an outer edge of the wafer, or any desired point on the surface of the wafer.
    Type: Grant
    Filed: July 20, 1999
    Date of Patent: September 11, 2001
    Assignee: International Business Machines Corporation
    Inventors: Cuc Kim Huynh, Paul A. Manfredi, Thomas J. Martin, Douglas P. Nadeau, Joseph M. Weatherwax, Jr.