Patents by Inventor Joseph Scandariato

Joseph Scandariato has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MULTI-WAFER ROTATING DISC REACTOR WITH INERTIAL PLANETARY DRIVE
    Publication number: 20160118291
    Abstract: Wafer carriers and methods for moving wafers in a reactor. The wafer carrier may include a platen with a plurality of compartments and a plurality of wafer platforms. The platen is configured to rotate about a first axis. Each of the wafer platforms is associated with one of the compartments and is configured to rotate about a respective second axis relative to the respective compartment. The platen and the wafer platforms rotate with different angular velocities to create planetary motion therebetween. The method may include rotating a platen about a first axis of rotation. The method further includes rotating each of a plurality of wafer platforms carried on the platen and carrying the wafers about a respective second axis of rotation and with a different angular velocity than the platen to create planetary motion therebetween.
    Type: Application
    Filed: January 4, 2016
    Publication date: April 28, 2016
    Inventors: Adrian Celaru, Todd Arthur Luse, Ajit Paranjpe, Joseph Scandariato, Qingfu Tang
  • Multi-wafer rotating disc reactor with inertial planetary drive
    Patent number: 9230846
    Abstract: Wafer carriers and methods for moving wafers in a reactor. The wafer carrier may include a platen with a plurality of compartments and a plurality of wafer platforms. The platen is configured to rotate about a first axis. Each of the wafer platforms is associated with one of the compartments and is configured to rotate about a respective second axis relative to the respective compartment. The platen and the wafer platforms rotate with different angular velocities to create planetary motion therebetween. The method may include rotating a platen about a first axis of rotation. The method further includes rotating each of a plurality of wafer platforms carried on the platen and carrying the wafers about a respective second axis of rotation and with a different angular velocity than the platen to create planetary motion therebetween.
    Type: Grant
    Filed: June 6, 2011
    Date of Patent: January 5, 2016
    Assignee: Veeco Instruments, Inc.
    Inventors: Adrian Celaru, Todd A. Luse, Ajit P. Paranjpe, Joseph Scandariato, Qingfu Tang
  • MULTI-WAFER ROTATING DISC REACTOR WITH INERTIAL PLANETARY DRIVE
    Publication number: 20110300297
    Abstract: Wafer carriers and methods for moving wafers in a reactor. The wafer carrier may include a platen with a plurality of compartments and a plurality of wafer platforms. The platen is configured to rotate about a first axis. Each of the wafer platforms is associated with one of the compartments and is configured to rotate about a respective second axis relative to the respective compartment. The platen and the wafer platforms rotate with different angular velocities to create planetary motion therebetween. The method may include rotating a platen about a first axis of rotation. The method further includes rotating each of a plurality of wafer platforms carried on the platen and carrying the wafers about a respective second axis of rotation and with a different angular velocity than the platen to create planetary motion therebetween.
    Type: Application
    Filed: June 6, 2011
    Publication date: December 8, 2011
    Applicant: VEECO INSTRUMENTS INC.
    Inventors: Adrian Celaru, Todd A. Luse, Ajit P. Paranjpe, Joseph Scandariato, Quinfu Tang