Patents by Inventor Joseph Statlender

Joseph Statlender has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma treatment of processing gases
    Publication number: 20040131513
    Abstract: The present invention provides a DBD cell (500) including ring shaped electrodes (512 and 514) that are positioned side-by-side on a dielectric tube (516). An AC power supply (518) is provided such that the cell and the power supply form a DBD treatment device (540) for abatement of noxious gases for example FCs that can be discharged from semiconductor fabricating devices. Additionally, one or more sensors (822) and/or one or more gas addition ports (816) can be included in a DBD cell (800) of the present invention. Several DBD cells (1030, 1036 and 1042) of the present invention can be combined to form a DBD reactor (1010) of the present invention. AC power supplies (1012, 1014 and 1016) are utilized to energize the cells (1030, 1036 and 1042), forming a novel noxious gas treatment device (1000) wherein plasmas are created when gas is present inside the reactor.
    Type: Application
    Filed: December 17, 2003
    Publication date: July 8, 2004
    Applicant: Applied Materials, Inc.
    Inventors: Stela Diamant Lazarovich, Avner Rosenberg, Joseph Shiloh, Joseph Statlender, Elhanan Wurzberg
  • Plasma treatment of processing gases
    Patent number: 6685803
    Abstract: The present invention provides a DBD cell (500) including ring shaped electrodes (512 and 514) that are positioned side-by-side on a dielectric tube (516). An AC power supply (518) is provided such that the cell and the power supply form a DBD treatment device (540) for abatement of noxious gases for example FCs that can be discharged from semiconductor fabricating devices. Additionally, one or more sensors (822) and/or one or more gas addition ports (816) can be included in a DBD cell (800) of the present invention. Several DBD cells (1030, 1036 and 1042) of the present invention can be combined to form a DBD reactor (1010) of the present invention. AC power supplies (1012, 1014 and 1016) are utilized to energize the cells (1030, 1036 and 1042).
    Type: Grant
    Filed: June 22, 2001
    Date of Patent: February 3, 2004
    Assignee: Applied Materials, Inc.
    Inventors: Stela Diamant Lazarovich, Avner Rosenberg, Joseph Shiloh, Joseph Statlender, Elhanan Wurzberg
  • Plasma treatment of processing gases
    Publication number: 20030007910
    Abstract: The present invention provides a DBD cell (500) including ring shaped electrodes (512 and 514) that are positioned side-by-side on a dielectric tube (516). An AC power supply (518) is provided such that the cell and the power supply form a DBD treatment device (540) for abatement of noxious gases for example FCs that can be discharged from semiconductor fabricating devices. Additionally, one or more sensors (822) and/or one or more gas addition ports (816) can be included in a DBD cell (800) of the present invention. Several DBD cells (1030, 1036 and 1042) of the present invention can be combined to form a DBD reactor (1010) of the present invention. AC power supplies (1012, 1014 and 1016) are utilized to energize the cells (1030, 1036 and 1042), forming a novel noxious gas treatment device (1000) wherein plasmas are created when gas is present inside the reactor.
    Type: Application
    Filed: June 22, 2001
    Publication date: January 9, 2003
    Inventors: Stela Diamant Lazarovich, Avner Rosenberg, Joseph Shiloh, Joseph Statlender, Elhanan Wurzberg