Patents by Inventor Josephine Juhwei Liu

Josephine Juhwei Liu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Composite removable hardmask
    Patent number: 8252699
    Abstract: A method and apparatus for forming an amorphous carbon layer on a substrate is provided. A first portion of the amorphous carbon layer having a high stress level is formed from a hydrocarbon precursor having high dilution ratio, with optional amine precursor included to add stress-elevating nitrogen. A second portion of the amorphous carbon layer having a low stress level is formed on the first portion by reducing the dilution ratio of the hydrocarbon precursor and lowering or eliminating the amine gas. Pressure, temperature, and RF power input may be adjusted instead of, or in addition to, precursor flow rates, and different precursors may be used for different stress levels.
    Type: Grant
    Filed: November 22, 2010
    Date of Patent: August 28, 2012
    Assignee: Applied Materials, Inc.
    Inventors: Anthony Konecni, Josephine Juhwei Liu, Deenesh Padhi, Bok Hoen Kim, William H. McClintock
  • COMPOSITE REMOVABLE HARDMASK
    Publication number: 20120129351
    Abstract: A method and apparatus for forming an amorphous carbon layer on a substrate is provided. A first portion of the amorphous carbon layer having a high stress level is formed from a hydrocarbon precursor having high dilution ratio, with optional amine precursor included to add stress-elevating nitrogen. A second portion of the amorphous carbon layer having a low stress level is formed on the first portion by reducing the dilution ratio of the hydrocarbon precursor and lowering or eliminating the amine gas. Pressure, temperature, and RF power input may be adjusted instead of, or in addition to, precursor flow rates, and different precursors may be used for different stress levels.
    Type: Application
    Filed: November 22, 2010
    Publication date: May 24, 2012
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Anthony Konecni, Josephine Juhwei Liu, Deenesh Padhi, Bok Hoen Kim, William H. Mc Clintock