Patents by Inventor Josephus Cornelius Vugts

Josephus Cornelius Vugts has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Temperature conditioned load lock, lithographic apparatus comprising such a load lock and method of manufacturing a substrate with such a load lock
    Publication number: 20050054217
    Abstract: A load lock for a lithographic apparatus is arranged to transfer an object, like a substrate, into and from the lithographic apparatus. The load lock outer wall defining at least part of a load lock volume accommodating a support unit for supporting the object when in the load lock. The load lock also has a temperature conditioned structure to control the temperature of the object to a desired temperature at least before the object is transferred from the load lock towards the lithographic projection apparatus.
    Type: Application
    Filed: March 11, 2004
    Publication date: March 10, 2005
    Applicant: ASML Netherlands B.V.
    Inventors: Albert Klomp, Jan Hoogkamp, Raimond Visser, Josephus Cornelius Vugts, Henricus Marie Vullings, Leo Kuipers, Johannes Franssen