Patents by Inventor Joshua Lamontagne

Joshua Lamontagne has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for ignition of a plasma system and for monitoring health of the plasma system
    Patent number: 10910798
    Abstract: An apparatus and method for determining the health of a plasma system by igniting a plasma within a plasma confining volume generate an ignition signal with an ignition circuit and apply the ignition signal between a biased region and a grounded region in the vicinity of the plasma confining volume. A parameter in the ignition circuit is sensed, and the sensed parameter is compared to a first parameter threshold. A condition associated with the plasma confining volume is determined if the sensed parameter differs from the first voltage threshold, and a corrective action can be taken.
    Type: Grant
    Filed: November 13, 2019
    Date of Patent: February 2, 2021
    Assignee: MKS Instruments, Inc.
    Inventors: Atul Gupta, Colin Sanford, Joshua Lamontagne, Kevin Wenzel
  • APPARATUS AND METHOD FOR IGNITION OF A PLASMA SYSTEM AND FOR MONITORING HEALTH OF THE PLASMA SYSTEM
    Publication number: 20200099199
    Abstract: An apparatus and method for determining the health of a plasma system by igniting a plasma within a plasma confining volume generate an ignition signal with an ignition circuit and apply the ignition signal between a biased region and a grounded region in the vicinity of the plasma confining volume. A parameter in the ignition circuit is sensed, and the sensed parameter is compared to a first parameter threshold. A condition associated with the plasma confining volume is determined if the sensed parameter differs from the first voltage threshold, and a corrective action can be taken.
    Type: Application
    Filed: November 13, 2019
    Publication date: March 26, 2020
    Applicant: MKS Instruments, Inc.
    Inventors: Atul Gupta, Colin Sanford, Joshua Lamontagne, Kevin Wenzel
  • Apparatus and method for ignition of a plasma system and for monitoring health of the plasma system
    Patent number: 10505348
    Abstract: An apparatus and method for determining the health of a plasma system by igniting a plasma within a plasma confining volume generate an ignition signal with an ignition circuit and apply the ignition signal between a biased region and a grounded region in the vicinity of the plasma confining volume. A parameter in the ignition circuit is sensed, and the sensed parameter is compared to a first parameter threshold. A condition associated with the plasma confining volume is determined if the sensed parameter differs from the first voltage threshold, and a corrective action can be taken.
    Type: Grant
    Filed: September 15, 2017
    Date of Patent: December 10, 2019
    Assignee: MKS Instruments, Inc.
    Inventors: Atul Gupta, Colin Sanford, Joshua Lamontagne, Kevin Wenzel
  • APPARATUS AND METHOD FOR IGNITION OF A PLASMA SYSTEM AND FOR MONITORING HEALTH OF THE PLASMA SYSTEM
    Publication number: 20190089135
    Abstract: An apparatus and method for determining the health of a plasma system by igniting a plasma within a plasma confining volume generate an ignition signal with an ignition circuit and apply the ignition signal between a biased region and a grounded region in the vicinity of the plasma confining volume. A parameter in the ignition circuit is sensed, and the sensed parameter is compared to a first parameter threshold. A condition associated with the plasma confining volume is determined if the sensed parameter differs from the first voltage threshold, and a corrective action can be taken.
    Type: Application
    Filed: September 15, 2017
    Publication date: March 21, 2019
    Applicant: MKS Instruments, Inc.
    Inventors: Atul Gupta, Colin Sanford, Joshua Lamontagne, Kevin Wenzel