Abstract: A system for drying microelectronic, optical and other parts which are rendered wet in the course of their processing, the system functioning rapidly to dry these parts so that they are free of contaminants. The system includes a drying chamber having a work zone in which the wet parts are held in a removable carrier resting on a stand, the work zone being heated to promote evaporation. Flowing through the work zone and passing over the wet parts is a gaseous stream which entrains vapors emitted from the parts and discharges the vapors from the chamber. To accelerate the evaporative process, a vibration generator is operatively coupled to the stand or to a vibration coupling device to impart vibrations thereto which are transmitted to the wet parts in the carrier, causing liquid drops on the surfaces of the parts to fractionate into droplets or to otherwise disperse and spread the liquid over a larger area, thereby greatly increasing the aggregate exposed surface area of the liquid.