Patents by Inventor Juan Carlos Rocha-Alverez

Juan Carlos Rocha-Alverez has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • DUAL DELIVERY CHAMBER DESIGN
    Publication number: 20120097330
    Abstract: A substrate processing system includes a thermal processor or a plasma generator adjacent to a processing chamber. A first processing gas enters the thermal processor or plasma generator. The first processing gas then flows directly through a showerhead into the processing chamber. A second processing gas flows through a second flow path through the showerhead. The first and second processing gases are mixed below the showerhead and a layer of material is deposited on a substrate under the showerhead.
    Type: Application
    Filed: October 20, 2010
    Publication date: April 26, 2012
    Applicant: Applied Materials, Inc.
    Inventors: Prahallad Iyengar, Sanjeev Baluja, Dale R. DuBois, Juan Carlos Rocha-Alverez, Thomas Nowak, Scott A. Hendrickson, Yong-Won Lee, Mei-Yee Shek, Li-Qun Xia, Derek R. Witty