Abstract: A method and system for high-speed 2? multi-point scatterometry is disclosed. The method includes directing a laser beam from a laser light source to a collimation optical system that collimates the laser beam to a collimated laser beam; adjusting a polarization of the collimated laser beam using a polarization control optics; directing the collimated laser beam that is polarized by a first optical system to illuminate a focal area on a sample surface; receiving reflected light from the focus of the laser light source at the sample surface by a second optical system; detecting the reflected light by a detector system to produce detection signals; and processing the detection signals to measure parameters of the sample surface.

Abstract: A system for measuring a periodic array of structures on a sample is provided. The system includes an optical source configured to produce an optical beam; an optical system configured to control the polarization of the optical beam and to focus the optical beam with a first NA1 on a sample surface and to sweep the angle of incidence across a range of angles with an approximately fixed focal position on a sample surface with a second NA2 wherein NA2>NA1; additional optical components configured to receive the optical beam reflected from the sample surface and to focus the reflected beam onto a detector; and a recording system to record the reflectivity of the sample surface as a function of the angle of incidence. In an embodiment, the optical system provides a spot on the sample such that both the angle of incidence and the position on the sample are varied during a sweep.

Abstract: A system for measuring a periodic array of structures on a sample is provided. The system includes an optical source configured to produce an optical beam; an optical system configured to control the polarization of the optical beam and to focus the optical beam with a first NA1 on a sample surface and to sweep the angle of incidence across a range of angles with an approximately fixed focal position on a sample surface with a second NA2 wherein NA2>NA1; additional optical components configured to receive the optical beam reflected from the sample surface and to focus the reflected beam onto a detector; and a recording system to record the reflectivity of the sample surface as a function of the angle of incidence.

Abstract: A system for measuring a periodic array of structures on a sample is provided. The system includes an optical source configured to produce an optical beam; an optical system configured to control the polarization of the optical beam and to focus the optical beam with a first NA1 on a sample surface and to sweep the angle of incidence across a range of angles with an approximately fixed focal position on a sample surface with a second NA2 wherein NA2>NA1; additional optical components configured to receive the optical beam reflected from the sample surface and to focus the reflected beam onto a detector; and a recording system to record the reflectivity of the sample surface as a function of the angle of incidence.

Abstract: An advertisement supported entertainment collection, distribution, and library system accessible over a network. The system retains and manages contents, advertisements, user demographics, content viewing, etc. on a central server enabling collection of viewing metrics and audience member demographics. Contents are segmented and characterized by multiple indices. Production contents are generated by combining a series of production segments with advertising segments inserted between segments. Advertising segment placement criteria is compared to content indices and user demographics to determine placement of advertising segments. Metrics, including advertisement placements, content indices, viewing data, library placement, and user demographics are analyzed to optimize advertisement placements.