Abstract: Method of and apparatus for drying articles (18), in particular articles which are used in electronics and require clean-room conditions for their manufacture. Drying according to the method of the invention uses a partial vacuum in a vacuum storage and at least one air blast across the article by opening the vacuum storage. The wetness on the article is blown off at high velocity. The air blast can be repeated until there is only a residual moisture left on the article. This moisture can be removed by evaporation in a partial vacuum. The drying apparatus comprises a process chamber (14) for the articles. The process chamber has air inlet openings (34) distributed over its transverse sectional area and at least one air outlet opening (26) positioned opposite the inlet openings.